Abstract: Based on the electron dynamic diffraction, phase shift of the exit wave function vs misorientation of the incident electron beam from the exact zone axis has been calculated for the [001] oriented copper. The result shows that the peak of phase shift is the maximum at the atom position as the electron beam along the exact [001] zone axis, and the peak value of phase shift decreases as increases of the misorientation. At small misorientation, i:e. less than 5 degree, change of the phase shift is minimal. The peak value of phase shift decreases significantly when the incident beam deviates form the zone axis over 10 degree and the exit wave has a planar configuration as the misoriention angle arrives ～17 degree. The effect of this phase shift characteristics on the information extracted from the hologram has also been considered.

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