Robust ultrathin and transparent AZO/Ag-SnOx/AZO on polyimide substrate for flexible thin film heater with temperature over 400 °C

doi:10.1016/j.jmst.2020.01.058

Abstract

Abstract:

We developed flexible and transparent thin film heaters (TFHs) with a structure of AZO/Ag-SnO_x/AZO/polyimide (PI) which exhibited superior stability under operational conditions. Ultrathin and robust doped silver (Ag) films were produced by introducing a small amount of SnO_x during the sputtering process. The AZO/Ag-SnO_x/AZO stacks showed the best figure of merit value of 139.9, which was higher than that of ITO counterpart (25.5) with the same thickness. In addition, it exhibited excellent durability, which showed unaffected optical and electrical properties under the heat treatment of 500 °C for 30 min in air, highly-accelerated temperature and humidity stress test (HAST) at 121 °C and 97%RH for 36 h, 10,000 times of scratching and 1500 times of inner and outer bending test. Furthermore, the TFHs based on AZO/Ag-SnO_x/AZO/PI achieved a high temperature of 438.8 °C with response time in several seconds, which outperformed most previous studies. The robust high-temperature TFHs in this research hold promising commercial applications in flexible and high temperature occasions.

Key words: Ultrathin Ag films, SnOx Doping, Durability, High temperature thin film heater

Zhaozhao Wang, Jia Li, Junjun Xu, Jinhua Huang, Ye Yang, Ruiqin Tan, Guofei Chen, Xingzhong Fang, Yue Zhao, Weijie Song. Robust ultrathin and transparent AZO/Ag-SnO_x/AZO on polyimide substrate for flexible thin film heater with temperature over 400 °C[J]. J. Mater. Sci. Technol., 2020, 48: 156-162.

Figures/Tables 6

Fig. 1. Schematic diagram of the fabrication process of TFHs based on AZO/Ag-SnOx/AZO and ITO thin films.

Fig. 2. (a) Transmittance spectra, (b) sheet resistance and FOM of PI/AZO/Ag-SnOx/AZO with different Ag thicknesses; AFM images of (c) pure PI and (d) PI/AZO/Ag-SnOx/AZO thin film. XPS profiles of (e) overall spectra, (f) Ag 3d and (g) Sn 3d of AZO/Ag (40 nm/10 nm) and AZO/Ag-SnOx (40 nm/10 nm) thin films.

Fig. 3. (a) Change in sheet resistance of Ag-SnOx and AZO/Ag-SnOx/AZO thin films; (b) Images of AZO/Ag-SnOx/AZO thin film, upper: as deposited, and lower: after heated at 300 ℃ for 30 min; (c-f) Fluorescence microscope images of AZO/Ag-SnOx/AZO thin films for 12-36 h HAST, and AZO/Ag/AZO thin film for 24 h HAST; (g) Sheet resistance and (h) transmittance spectra of AZO/Ag-SnOx/AZO thin film with different hours for HAST.

Fig. 4. (a) AZO/Ag/AZO and AZO/Ag-SnOx/AZO thin films’ shedding area as a function of number of scratches. Inset picture is schematic diagrams of architectural paint scrubber. (b) Change in sheet resistance of AZO/Ag-SnOx/AZO thin film as a function of bending cycles.

Fig. 5. (a) Temperature profile of AZO/Ag-SnOx/AZO-based TFH under operation at different input voltages. The inset is an infrared thermal image of TFH at 16 V. (b) Heating cycles at 10 V. (c) Temperature profiles of AZO/Ag-SnOx/AZO-based TFH and ITO-based TFH at the same DC input power of 10 V. (d) Peak temperature as a function of voltage for AZO/Ag-SnOx/AZO-based and ITO-based TFHs.

Fig. 6. Maximum temperature obtained as a function of TFOM and response times for AZO/Ag-SnOx/AZO-based and ITO-based TFHs compared with other work.

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