Effect of TiO2 Functionalization on Nano-Porous Silicon for Selective Alcohol Sensing at Room Temperature

doi:10.1016/j.jmst.2016.10.010

Abstract

Abstract:

Room temperature operated sensor for detection of alcohol vapours in low ppm range based on TiO₂ functionalized nano-porous silicon (PSi) is demonstrated. The effect of functionalization by TiO₂ on PSi is investigated using SEM, EDX, Raman spectroscopy, XRD and contact angle measurements. Sensing is accomplished by measuring change in resistance of the sensing layer using Cr-Au inter-digitated-electrode (IDE) structure formed on top of the functionalized PSi layer. The sensors were tested for volatile organic compounds (VOCs) and water vapours in the wide range of 5-500 ppm concentration at room temperature. Functionalization of the nanostructured PSi by sputter deposited TiO₂ results in significant enhancement of sensitivity and inverse change in selectivity. PSi sensors have displayed strong response to water vapours whereas after functionalization, selective sensing to ethanol is depicted. Minimum detection by PSi sensors is portrayed at 100 ppm and that of functionalized sensors is at 10 ppm. Sensing mechanism is explained on the basis of surfaces and structures of both PSi and TiO₂. This study incites the importance of surface treatment of PSi for tuning the sensing properties and is useful in the development of selective alcohol sensors.

Key words: Functionalization, Porous silicon, Selectivity, Sensor, Titanium dioxide (TiO₂)

Dwivedi Priyanka, Dhanekar Saakshi, Das Samaresh, Chandra Sudhir. Effect of TiO₂ Functionalization on Nano-Porous Silicon for Selective Alcohol Sensing at Room Temperature[J]. J. Mater. Sci. Technol., 2017, 33(6): 516-522.

Figures/Tables 8

Fig. 1. (a) Process flow for fabrication of sensors, (b) sensing setup for testing of sensors.

Fig. 2. SEM micrographs of sample (a) PSi, (b) TiO2 functionalized PSi and (c) cross-sectional SEM micrograph of TiO2 functionalized PSi.

Fig. 3. (a) SEM images of TiO2 functionalized PSi sample during EDX analysis and brighter part of micrographs showing elements (b) Ti, (c) O, (d) Si, and (e) EDX spectrum of a TiO2 functionalized PSi sample.

Fig. 4. Structural analysis of PSi and TiO2 functionalized PSi samples studies using (a) Raman spectra and (b) XRD pattern.

Fig. 5. Contact angle measurements for (a) PSi and (b) TiO2 functionalized PSi samples.

Fig. 6. Sensing response of all sensors in presence of different analytes. (a) Dynamic response of sensors showing change in resistance of PSi and TiO2 functionalized PSi in presence of various concentration of ethanol. The inset shows response of TiO2 functionalized PSi to 5 ppm concentration of ethanol. The dashed blue lines show the pulse ON and OFF and concentration of ethanol. (b) Sensor response (in %) of PSi and TiO2 functionalized PSi sensors in presence and increasing concentrations of water vapours and ethanol. It shows a model of water molecule and ethanol where red balls represent oxygen atoms, light gray represent hydrogen and dark gray represent carbon atoms. (c) Sensitivity and selectivity plot for all sensors in presence of different analytes.

Fig. 7. Ageing study of TiO2 functionalized PSi sensor in presence of 10 ppm of ethanol.

Fig. 8. (a) Sensing mechanism of functionalized PSi to ethanol vapours (the grain is shown for symbolic representation) and (b) hetero-junction before and after PSi and TiO2 contact.

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Effect of TiO₂ Functionalization on Nano-Porous Silicon for Selective Alcohol Sensing at Room Temperature

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