J. Mater. Sci. Technol. ›› 2020, Vol. 38: 56-63.DOI: 10.1016/j.jmst.2019.09.002

• Research Article • Previous Articles     Next Articles

Improved formaldehyde gas sensing properties of well-controlled Au nanoparticle-decorated In2O3 nanofibers integrated on low power MEMS platform

Dongha Ima, Donghyun Kimab, Dasol Jeonga, Woon Ik Parka, Myoungpyo Chuna, Joon-Shik Parkc, Hyunjung Kimb, Hyunsung Junga*()   

  1. a Nano Materials & Nano Technology Center, Korea Institute of Ceramic Engineering & Technology, Jinju 52851, Republic of Korea
    bDepartment of Mineral Resources and Energy Engineering, Chonbuk National University, Jeonju 54896, Republic of Korea
    cSmart Sensor Research Center, Korea Electronic Technology Institute, Seongnam 13509, Republic of Korea
  • Received:2019-05-03 Revised:2019-07-08 Accepted:2019-07-15 Published:2020-02-01 Online:2020-02-10
  • Contact: Jung Hyunsung


Approaches for the fabrication of a low power-operable formaldehyde (HCHO) gas sensor with high sensitivity and selectivity were performed by the utilization of an effective micro-structured platform with a micro-heater to reach high temperature with low heating power as well as by the integration of indium oxide (In2O3) nanofibers decorated with well-dispersed Au nanoparticles as a sensing material. Homogeneous In2O3 nanofibers with the large specific surface area were prepared by the electrospinning following by calcination process. Au nanoparticles with the well-controlled size as a catalyst were synthesized on the surface of In2O3 nanofibers. The Au-decorated In2O3 nanofibers were reliably integrated as sensing materials on the bridge-type micro-platform including micro-heaters and micro-electrodes. The micro-platform designed to maintain high temperature with low power consumption was fabricated by a microelectromechanical system (MEMS) technique. The micro-platform gas sensor consisting with Au-In2O3 nanofibers were fabricated effectively to detect HCHO gases with high sensitivity and selectivity. The HCHO gas sensing behaviors were schematically studied as a function of the gas concentration, the size of the adsorbed Au nanoparticles, the applied power to raise the temperature of a sensing part and the kind of target gases.

Key words: Gold nanoparticle, In2O3 nanofiber, Formaldehyde, Gas sensor, Low power, Micro-platform