Influence of Sputtering Gas on Morphological and Optical Properties of Magnesium Films

Abstract

Abstract: The influence of sputtering gas (He & Ar) on the structural properties of Mg thin films has been investigated. The optical property (reflectance) that results from the growth of films at varying substrate temperatures (Tsub) was also studied. The deposited films were characterized by using X-ray diffraction (XRD), field emission scaning electron microscopy (FE-SEM), atomic force microscopy (AFM) and UV-Vis-NIR spectrophotometer. The smaller crystallite size and lower deposition rate were observed in the presence of Helium atmosphere compared to Argon. Morphology of the films shows 2D hexagonal geometry of grains in the deposition temperature range (T_sub≈50−150°C) in both the sputtering gases. The surface roughness of the polycrystalline films were found to increase with increase in the deposition temperature of both ambient gases. Optical reflectance of Mg films was measured in near infrared region and larger reflectance was observed from Mg films sputtered in He atmosphere compared to that in argon.

Key words: X-ray diffraction (XRD), Atomic force microscopy (AFM), Reflectance, Mg films, Microstructure

Yogendra K. Gautam Amit K. Chawla Vipin Chawla R.D. Agrawal. Influence of Sputtering Gas on Morphological and Optical Properties of Magnesium Films[J]. J Mater Sci Technol, 2011, 27(1): 51-58.

References

[1 ] J.N. Huiberts, R. Griessen, J.H. Rector, R.J. Wijngaargen, J.P. Dekker, D.G. de Groot and N.J. Koeman: Nature, 1996, 380, 231.

[2 ] G. Sivieroa, V. Belloa, G. Matteia, P. Mazzoldia, G. Battaglinb, N. Bazzanellac, R. Checchettoc and A. Miotelloc: 2nd International Workshop on Hydrogen, doi:10.1016/j.ijhydene.2009.03.059.

[3 ] J. Qu, Y. Wang, L. Xie, J. Zheng, Y. Liu and X. Li: Int. J. Hydrogen Energy, 2009, 34, 1910.

[4 ] S.J. VanderMolen, J.W.J. Kerssemakers, J.H. Rector, N.J. Koeman, B. Dam and R. Griessen: J. Appl. Phys., 1999, 86, 6107.

[5 ] D.G. Nagengast, J.W.J. Kerssemakers, A.T.M Van Gogh, B. Dam and R. Griessen: Appl. Phys. Lett., 1999, 75, 1724.

[6 ] P. Van der Sluis, M. Ouwerkerk and P.A. Duine: Appl. Phys Lett., 1997, 70, 3356.

[7 ] D.G. Nagengast, A.T.M. Van Gogh, E.S. Kooij, B. Dam and R. Griessen: Appl. Phys. Lett., 1999, 75, 2050.

[8 ] T.J. Richardson, J.L. Slack, R.D. Armitage, R. Kostecki, B. Farangis and M.D. Rubin: Appl. Phys. Lett., 2001, 78, 3047.

[9 ] J. Isidorsson, I.A.M.E. Giebels, H. Arwin and R.Griessen: Phys. Rev. B, 2003, 68(11), 5112.

[10] K. Yamamoto, K. Higuchi, H. Kajioka, H. Sumida, S. Orimo and H. Fujii: J. Alloy. Compd., 2002, 330, 352.

[11] G. Alefeld and J. Volk: Hydrogen in Metals, Topics in Applied Physics, Springer, Berlin, 1978.

[12] B. Sakintuna, F. Lamari-Darkrim and M. Hirscher: Int. J. Hydrogen Energy, 2007, 32, 1121.

[13] M. Jurczyk, L. Smardz, I. Okonska, E. Jankowska, M. Nowak and K. Smardz: Int. J. Hydrogen Energy, 2008, 33, 374.

[14] T.J. Richardson, J.L. Slack, B. Farangis and M.D. Rubin: Appl. Phys. Lett., 2002, 80, 1349.

[15] C. Blawert, V. Heitmann, W. Dietzel, M. StÄormer, Y. Bohne, S. Mandl and B. Rauschenbach: Mater. Sci. Forum, 2007, 539-543, 679

[16] D.M. Seeger, C. Blawert, W. Dietzel, Y. Bohne, S. MÄandl and B. Rauschenbach: Magnesium Technology 2007, 134th Annual Meeting & Exhibition, San Francisco CA (USA), February, 2005, 13-17, 323.

[17] Cultrera, A. Pereira, C. Ristoscu, A. Clozza, F. Tazzioli and C. Vicarion: Appl. Surf. Sci., 2005, 248, 397.

[18] B.D. Cullity: Elements of X-ray Di®raction, 2nd edn, Addison-Wesley and London, 1978, 102.

[19] A.K. Chawla and R. Chandra: J. Nanopart. Res., 2009, 11, 297.

[20] V. Chawla, R. Jayaganthan, A.K. Chawla and R. Chandra: Mater. Chem. Phys., 2008, 111, 414.

[21] http://en.wikipedia.org/wiki/Coe±cient¡of¡thermal¡ expansion.

[22] M.I. Stormer, C. Blawert, H. Hagen, V. Heitmann and W. Dietzel: Plasma Process. Polym., 2007, 4S, 557.

[23] S.M. He, Y.R. Li, X.Z. Liu, B.W. Tao, D.H. Li and Q.F. Lu: Thin Solid Films, 2005, 478, 261.

[24] L.I. Maissel and R. Glang: Handbook of Thin Film Technology, McGraw-Hill, New York, 1970, P1.

[25] R. Chandra, A.K. Chawla and P. Ayyub: J. Nanosci. Nanotech., 2006, 6, 1119.

[26] T. Koyanagi, K. Takao and Y. Fukuma: Vacuum, 1998, 51, 575.

[27] E. Shalaan and H. Schmitt: Surf. Sci., 2006, 600, 3650.

[28] Y. Yamada, S. Bao, K. Tajima, M. Okada, K. Yoshimura and A. Roos: Sol. Energ. Mat. Sol. C, 2008, 92, 1617.

[1]	Lin Yuan, Jiangtao Xiong, Yajie Du, Jin Ren, Junmiao Shi, Jinglong Li. Microstructure and mechanical properties in the TLP joint of FeCoNiTiAl and Inconel 718 alloys using BNi2 filler [J]. J. Mater. Sci. Technol., 2021, 61(0): 176-185.
[2]	Xiong-jie Gu, Wei-li Cheng, Shi-ming Cheng, Yan-hui Liu, Zhi-feng Wang, Hui Yu, Ze-qin Cui, Li-fei Wang, Hong-xia Wang. Tailoring the microstructure and improving the discharge properties of dilute Mg-Sn-Mn-Ca alloy as anode for Mg-air battery through homogenization prior to extrusion [J]. J. Mater. Sci. Technol., 2021, 60(0): 77-89.
[3]	Yanxin Qiao, Daokui Xu, Shuo Wang, Yingjie Ma, Jian Chen, Yuxin Wang, Huiling Zhou. Effect of hydrogen charging on microstructural evolution and corrosion behavior of Ti-4Al-2V-1Mo-1Fe alloy [J]. J. Mater. Sci. Technol., 2021, 60(0): 168-176.
[4]	Yunsheng Wu, Xuezhi Qin, Changshuai Wang, Lanzhang Zhou. Microstructural evolution and its influence on the impact toughness of GH984G alloy during long-term thermal exposure [J]. J. Mater. Sci. Technol., 2021, 60(0): 61-69.
[5]	Hui Jiang, Dongxu Qiao, Wenna Jiao, Kaiming Han, Yiping Lu, Peter K. Liaw. Tensile deformation behavior and mechanical properties of a bulk cast Al_0.9CoFeNi₂ eutectic high-entropy alloy [J]. J. Mater. Sci. Technol., 2021, 61(0): 119-124.
[6]	Jincheng Wang, Yujing Liu, Chirag Dhirajlal Rabadia, Shun-Xing Liang, Timothy Barry Sercombe, Lai-Chang Zhang. Microstructural homogeneity and mechanical behavior of a selective laser melted Ti-35Nb alloy produced from an elemental powder mixture [J]. J. Mater. Sci. Technol., 2021, 61(0): 221-233.
[7]	Qin Xu, Dezhi Chen, Chongyang Tan, Xiaoqin Bi, Qi Wang, Hongzhi Cui, Shuyan Zhang, Ruirun Chen. NbMoTiVSi_x refractory high entropy alloys strengthened by forming BCC phase and silicide eutectic structure [J]. J. Mater. Sci. Technol., 2021, 60(0): 1-7.
[8]	K.J. Tan, X.G. Wang, J.J. Liang, J. Meng, Y.Z. Zhou, X.F. Sun. Effects of rejuvenation heat treatment on microstructure and creep property of a Ni-based single crystal superalloy [J]. J. Mater. Sci. Technol., 2021, 60(0): 206-215.
[9]	Hui Xiao, Manping Cheng, Lijun Song. Direct fabrication of single-crystal-like structure using quasi-continuous-wave laser additive manufacturing [J]. J. Mater. Sci. Technol., 2021, 60(0): 216-221.
[10]	Xing Zhou, Jingrui Deng, Changqing Fang, Wanqing Lei, Yonghua Song, Zisen Zhang, Zhigang Huang, Yan Li. Additive manufacturing of CNTs/PLA composites and the correlation between microstructure and functional properties [J]. J. Mater. Sci. Technol., 2021, 60(0): 27-34.
[11]	Zijuan Xu, Zhongtao Li, Yang Tong, Weidong Zhang, Zhenggang Wu. Microstructural and mechanical behavior of a CoCrFeNiCu₄ non-equiatomic high entropy alloy [J]. J. Mater. Sci. Technol., 2021, 60(0): 35-43.
[12]	B.N. Du, Z.Y. Hu, L.Y. Sheng, D.K. Xu, Y.X. Qiao, B.J. Wang, J. Wang, Y.F. Zheng, T.F. Xi. Microstructural characteristics and mechanical properties of the hot extruded Mg-Zn-Y-Nd alloys [J]. J. Mater. Sci. Technol., 2021, 60(0): 44-55.
[13]	XianCao Ping, ZhangShuang Liu, Xue-Lin Lei, Run-Zi Wang, Xian-Cheng Zhang, Shan-Tung Tu. A novel hole cold-expansion method and its effect on surface integrity of nickel-based superalloy [J]. J. Mater. Sci. Technol., 2020, 59(0): 129-137.
[14]	Min Jung Kim, Gyeol Chan Kang, Sung Hwan Hong, Hae Jin Park, Sang Chul Mun, Gian Song, Ki Buem Kim. Understanding microstructure and mechanical properties of (AlTa_0.76)_xCoCrFeNi_2.1 eutectic high entropy alloys via thermo-physical parameters [J]. J. Mater. Sci. Technol., 2020, 57(0): 131-137.
[15]	Chaoyu Han, Shibo Wen, Feng Ye, Wenjia Wu, Shaowei Xue, Yongfeng Liang, Binbin Liu, Junpin Lin. Deformation twinning in equiaxed-grained Fe-6.5 wt.%Si alloy after rotary swaging [J]. J. Mater. Sci. Technol., 2020, 49(0): 25-34.