J. Mater. Sci. Technol. ›› 2022, Vol. 97: 29-37.DOI: 10.1016/j.jmst.2021.04.028
• Research Article • Previous Articles Next Articles
Jing Weia, Peng Guoa, Hao Lia,b, Peiling Kea,b, Aiying Wanga,b,c,*()
Received:
2020-12-24
Revised:
2021-03-09
Accepted:
2021-04-14
Published:
2021-06-15
Online:
2021-06-15
Contact:
Aiying Wang
About author:
* Key Laboratory of Marine Materials and Related Tech- nologies, Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sci-ences, Ningbo 315201, China. E-mail address: aywang@nimte.ac.cn (A. Wang).Jing Wei, Peng Guo, Hao Li, Peiling Ke, Aiying Wang. Insights on high temperature friction mechanism of multilayer ta-C films[J]. J. Mater. Sci. Technol., 2022, 97: 29-37.
Samples | Alternated bias voltage (V) | Bias of top layer (V) | Total thickness(nm) |
---|---|---|---|
S1 | -150/-50 | / | 245 |
S2 | -150/-50 | -50 (hard) | 360 |
S3 | -150/-50 | -150 (soft) | 368 |
Table. 1 Specific parameters of the designed multilayer ta-C films.
Samples | Alternated bias voltage (V) | Bias of top layer (V) | Total thickness(nm) |
---|---|---|---|
S1 | -150/-50 | / | 245 |
S2 | -150/-50 | -50 (hard) | 360 |
S3 | -150/-50 | -150 (soft) | 368 |
Fig. 11. (a) The XPS C 1s spectra of the as-prepared and annealed S2 film, (b) the relative content of sp3, sp2 and C—O fractions acquired from peak-fitting.
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