J Mater Sci Technol ›› 2007, Vol. 23 ›› Issue (04): 504-508.

• Research Articles • Previous Articles     Next Articles

Microstructure Control of Nanoporous Silica Thin Film Prepared by Sol-gel Process

Yiqun XIAO, Jun SHEN, Zhiyong XIE, Bin ZHOU, Guangming WU   

  1. Pohl Institute of Solid State Physics, Tongji University, Shanghai 200092, China
  • Received:2006-06-12 Revised:2006-10-23 Online:2007-07-28 Published:2009-10-10
  • Contact: Jun SHEN

Abstract: Nanoporous silica films were prepared by sol-gel process with base, acid and base/acid two-step catalysis. Transmission electron microscope (TEM) and particle size analyzer were used to characterize the microstructure and the particle size distribution of the sols. Scanning electron microscopy (SEM), atomic force microscopy (AFM) and spectroscopic ellipsometer were used to characterize the surface microstructure and the optical properties of the silica films. Stability of the sols during long-term storage was investigated. Moreover, the dispersion relation of the optical constants of the silica films, and the control of the microstructure and properties of the films by changing the catalysis conditions during sol-gel process were also discussed.

Key words: Sol-gel, Nanoporous, Microstructure, Optical constants