J. Mater. Sci. Technol. ›› 2023, Vol. 143: 12-19.DOI: 10.1016/j.jmst.2022.09.052

• Research Article • Previous Articles     Next Articles

Direct mask-free fabrication of patterned hierarchical graphene electrode for on-chip micro-supercapacitors

Yaopeng Wua, Jinghong Chena, Wei Yuana,*, Xiaoqing Zhanga, Shigen Baib, Yu Chenc, Bote Zhaoc, Xuyang Wua, Chun Wanga, Honglin Huanga, Yong Tanga, Zhenping Wana, Shiwei Zhanga, Yingxi Xiea   

  1. aSchool of Mechanical and Automotive Engineering, South China University of Technology, Guangzhou 510640, China
    bIntelligent Perception Institute, Zhejiang Lab, Hangzhou 311100, China
    cSchool of Environment and Energy, South China University of Technology, Guangzhou 510006, China
  • Received:2022-06-16 Revised:2022-06-16 Accepted:2022-06-16 Online:2023-04-14
  • Contact: *E-mail address: mewyuan@scut.edu.cn (W. Yuan).

Abstract: Graphene-based electrodes with rational structural design have shown extraordinary prospect for enhanced electrical double-layer capacitance of micro-supercapacitors (MSCs). Herein, a facile fabrication method for flexible planar MSCs based on hierarchical graphene was demonstrated by using a laser-treated membrane for electrode patterning, complemented with hierarchical electrode configuration taking full advantages of size-determined functional graphene. The in-plane interdigital shape of MSCs was defined through vacuum filtration with the assistance of the functionalized polypropylene (PP) membrane. The hierarchical graphene films were built by macroscopic assembly based on size effect of different lateral sized graphene sheets (rGO-LSL). The sample of MSCs based on rGO-LSL (MSCs-LSL) exhibited excellent volumetric capacitance of 6.7 F cm-3 and high energy density of 0.37 mWh cm-3. The MSCs-LSL presented superb flexibility and cycling stability with no capacitance deteroriated after 2000 cycles. This newly developed fabrication strategy is of good scalability and designability to manufacture flexible electrode for MSCs with customized shapes, while the construction of hierarchical graphene can enlighten the structural design of analogous two-dimensional materials for potential advanced electronics.

Key words: On-chip micro-supercapacitors, Mask-free fabrication, Macroscopic assembly, Patterned graphene film, Hierarchical structure