Preparation of Ti2AlC MAX Phase Coating by DC Magnetron Sputtering Deposition and Vacuum Heat Treatment

doi:10.1016/j.jmst.2015.10.014

J. Mater. Sci. Technol. ›› 2015, Vol. 31 ›› Issue (12): 1193-1197.DOI: 10.1016/j.jmst.2015.10.014

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Preparation of Ti₂AlC MAX Phase Coating by DC Magnetron Sputtering Deposition and Vacuum Heat Treatment

Zongjian Feng, Peiling Ke, Aiying Wang

Key Laboratory of Marine Materials and Related Technologies, Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China

Received:2014-11-11 Revised:2014-12-08 Online:2015-12-19
Contact: Prof., Ph.D.; Tel.: +86 574 86685170; Fax: +86 574 86685159. (P. Ke), (A. Wang). E-mail addresses: kepl@nimte.ac.cn (P. Ke), aywang@nimte.ac.cn (A. Wang).
Supported by:
This project is supported by the National Natural Science Foundation of China (Grant No.51522106 and Grant No. 51401229), the National Science and Technology Major Project of China (Grant No. 2015ZX06004-001) and the Ningbo Municipal Natural Science Foundation (Grant No. 2014A610013).

Abstract

Abstract: Due to the excellent corrosion resistance and high irradiation damage resistance, Ti₂AlCMAX phase is considered as a candidate for applications as corrosion resistant and irradiation resistant protective coating. MAX phase coatings can be fabricated through firstly depositing a coating containing the three elements M, A, and X close to stoichiometry of the MAX phases using physical vapor deposition, followed by heat treatment in vacuum. In this work, Ti-Al-C coating was prepared on austenitic stainless steels by reactive DC magnetron sputtering with a compound Ti₅₀Al₅₀ target, and CH₄used as the reactive gas. It was found that the as-deposited coating is mainly composed of Ti₃AlC antiperovskite phase with supersaturated solid solution of Al. Additionally, the ratio of Ti/Al remained the same as that of the target composition. Nevertheless, a thicker thermally grown Ti₂AlC MAX phase coating was obtained after being annealed at 800 °C in vacuum for 1 h. Meanwhile, the ratio of Ti/Al became close to stoichiometry of Ti₂AlCMAX phases. It can be understood that owing to the higher activity of Al, it diffused quickly into the substrate during annealing, and then more stable Ti₂AlC MAX phases transformed from the Ti₃AlC antiperovskite phase.

Key words: Ti2AlC, MAX phase, Coating, Magnetron sputtering, Microstructure

Zongjian Feng, Peiling Ke, Aiying Wang. Preparation of Ti₂AlC MAX Phase Coating by DC Magnetron Sputtering Deposition and Vacuum Heat Treatment[J]. J. Mater. Sci. Technol., 2015, 31(12): 1193-1197.

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Preparation of Ti₂AlC MAX Phase Coating by DC Magnetron Sputtering Deposition and Vacuum Heat Treatment

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