Effect of Heat Treatment on the Microstructure and Residual Stresses in (Ti,Al)N Films

Abstract

Abstract: (Ti,Al)N films were fabricated by arc ion plating (AIP) and then annealed within a range of temperatures from 200 to 500°C for 30 min in vacuum. The results indicate that the average residual stresses decrease slightly from −5.84 to −4.98 GPa with increasing annealing temperature. The stress depth distribution evolves from a sharp ``bell" shape to a mild ``bell" shape, suggesting a more uniform stress state in the annealed films. The microstructure of the films was also investigated in detail. The as-deposited film consists of fine columnar crystals with an amorphous phase at the interface. During heat treatment, the columnar subgrain growth was observed; meanwhile, the phenomenon of crystallization has been identified at the interface. Further more, the relationship between the residual stresses and the microstructure of the films was explored and highlighted. In addition, there is no hardness degradation of the films during heat treatment.

Key words: Arc ion plating, Heat treatment, Microstructure, Stress distribution, (Ti,Al)N

Ying Yang, Shengsheng Zhao, Jun Gong, Xin Jiang, Chao Sun. Effect of Heat Treatment on the Microstructure and Residual Stresses in (Ti,Al)N Films[J]. J Mater Sci Technol, 2011, 27(5): 385-392.

References

[1 ] P.C. Jindal, A.T. Santhanam, U. Schleinlofer and A.F. Shuster: Int. J. Refract. Met. Hard Mater., 1999, 17, 163.

[2 ] S. PalDey and S.C. Deevi: Mater. Sci. Eng. A, 2003, 342, 58.

[3 ] Y. Tanaka, T.M. GÄur, M. Kelly, S.B. Hangstrom, T. Ikeda, K. Wakihira and H. Satoh: J. Vac. Sci. Technol. A, 1992, 10, 1749.

[4 ] T. Matsue, T. Hanabusa, Y. Miki, K. Kusaka and E. Maitani: Thin Solid Films, 1999, 343-344, 257.

[5 ] H. Oettel, R. Wiedemann and S. Prei¯ler: Surf. Coat. Technol., 1995, 74-75, 273.

[6 ] V. Teixeira: Vacuum, 2002, 64, 393.

[7 ] C.H. Wei and J.Y. Yen: Diam. Relat. Mater., 2007, 16, 1325.

[8 ] S.S. Zhao, Y. Yang, J.B. Li, J. Gong and C. Sun: Surf. Coat. Technol., 2008, 202, 5185.

[9 ] M. Bielawski: Surf. Coat. Technol., 2006, 200, 3987.

[10] W. Herr and E. Broszeit: Surf. Coat. Technol., 1997, 97, 335.

[11] C. Mitterer, P.H. Mayrhofer and J. Musil: Vacuum, 2003, 71, 279.

[12] L. Karlsson, A. Horling, M.P. Johansson, L. Hultman and G. Ramanath: Acta Mater., 2002, 50, 5103.

[13] H. KÄostenbauer, G.A. Fontalvo, M. Kapp, J. Keckes and C. Mitterer: Surf. Coat. Technol., 2007, 201, 4777.

[14] S.S. Zhao, H. Du, W.G. Hua, J. Gong, J.B. Li and C. Sun: J. Mater. Res., 2007, 22(10), 2659.

[15] B. Subramanian, K. Ashok, P. Kuppusami, C. Sanjeeviraja and M. Jayachandran: Cryst. Res. Technol., 2008, 43(10), 1078.

[16] P.H. Mayrhofer, C. Mitterer, L. Hultman and H. Clemens: Prog. Mater. Sci., 2006, 51, 1032.

[17] C.M. Suh, B.W. Hwang and R.I. Murakami: Mater. Sci. Eng. A, 2003, 343, 1.

[18] Y.H. Zhao, G.Q. Lin, X.N. Li, C. Dong and L.S. Wen: Acta Metall. Sin., 2005, 41, 1106. (in Chinese)

[19] M.H. Shiao and F.S. Shieu: Thin Solid Films, 2001, 386, 27.

[20] P.H. Mayrhofer: Nanostructural Design of Hard Thin Films, Ph.D. Thesis, University of Leoben, 2004.

[21] J.A. Thornton: Ann. Rev. Mater. Sci., 1977, 7, 239.

[22] G.C.A.M. Janssen, F.D. Tichelaar and C.C.G. Visser: J. Appl. Phys., 2006, 100, 093512.

[23] L. Hultman, G. Hakansson, U. Wahlstrom, J.E. Sundgren, I. Petrov, F. Adibi and J.E. Greene: Thin Solid Films, 1991, 250, 153.

[24] L. Karlsson, L. Hultman, M.P. Johansson, J.E. Sundgren and H. Ljungcrantz: Surf. Coat. Technol., 2000, 126, 1.

[25] J. Diehl: Z. Metallkd., 1956, 47, 411.

[26] L. Karlsson, L. Hultman and J.E. Sundgren: Thin Solid Films, 2000, 371, 167.

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