J. Mater. Sci. Technol. ›› 2017, Vol. 33 ›› Issue (8): 815-820.DOI: 10.1016/j.jmst.2016.07.020
• Orginal Article • Previous Articles Next Articles
Yao Yaxuan, Ren Lingling(), Gao Sitian, Li Shi
Received:
2016-03-02
Revised:
2016-06-20
Accepted:
2016-07-11
Online:
2017-08-20
Published:
2017-10-31
Yao Yaxuan, Ren Lingling, Gao Sitian, Li Shi. Histogram method for reliable thickness measurements of graphene films using atomic force microscopy (AFM)[J]. J. Mater. Sci. Technol., 2017, 33(8): 815-820.
Fig. 2. AFM results of 1L graphene: (a) topographical image; (b) amplitude error image; (c) phase image; (d) height profile along the red line in (a); (e) histogram method for height difference between graphene (AA) and substrate (AB).
Flatten order | Height difference (nm) |
---|---|
0th | 4.01 |
1st | 1.63 |
2nd | 1.52 |
3rd | -0.32 |
Table 1 Thickness difference of 1L graphene under various orders of flatten.
Flatten order | Height difference (nm) |
---|---|
0th | 4.01 |
1st | 1.63 |
2nd | 1.52 |
3rd | -0.32 |
Amplitude setpoint (mV) | Height difference (nm) |
---|---|
60 | 1.23 |
80 | 1.37 |
100 | 1.52 |
120 | 1.51 |
Table 2 Thickness difference of 1L graphene under various amplitude setpoints.
Amplitude setpoint (mV) | Height difference (nm) |
---|---|
60 | 1.23 |
80 | 1.37 |
100 | 1.52 |
120 | 1.51 |
Drive amplitude (mV) | Height difference (nm) |
---|---|
60 | 3.89 |
80 | 1.37 |
100 | 1.52 |
120 | 1.59 |
140 | 1.48 |
160 | 3.07 |
Table 3 Thickness of 1L graphene under various drive amplitudes.
Drive amplitude (mV) | Height difference (nm) |
---|---|
60 | 3.89 |
80 | 1.37 |
100 | 1.52 |
120 | 1.59 |
140 | 1.48 |
160 | 3.07 |
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