[1 ] C.M. Wayman: Mater. Res. Soc. Symp. Proc., 1984, 21, 657.
[2 ] R.H. Wolf and A.H. Heuer: J. Microelectromech. Syst., 1995, 4, 206.
[3 ] Y.Q. Fu and H.J. Du: Surf. Coat. Technol., 2002, 153, 100.
[4 ] H. Kahn, M.A. Hu® and A.H. Heuer: J. Micromech. Microeng., 1998, 8, 213.
[5 ] A.P. Jardine and P.G. Mercado: Mater. Res. Soc. Symp. Proc., 1993, 311, 161.
[6 ] J.L. Seguin, M. Vendan, A. Isalgue, V. Esteve-Cano, H. Carchano and V. Torra: Sensor. Actuator., 1999, 74, 65.
[7 ] Y. Yang, H.S. Jia, Z.F. Zhang, H.M. Shen, A. Hu and Y.N. Wang: Mater. Lett., 1995, 22, 137.
[8 ] J.D. Bush, A.D. Johnson, C.H. Lee and D.A. Stevenson: J. Appl. Phys., 1990, 68, 3224.
[9 ] Y. Kawamura, A. Gyobu, T. Saburi and M. Asai: Mater. Sci. Forum, 2000, 327-328, 303.
[10] A. Ishida and V. Martynov: MRS Bull., 2002, 27, 111.
[11] S. Kajiwara, K. Ogawa, T. Kikuchi, T. Matsunaga and S. Miyazaki: Phil. Mag. Lett., 1996, 74, 395.
[12] W.C. Oliver and G.M. Pharr: J. Mater. Res., 1992, 7, 1564.
[13] F.R. Brotzen: Int. Mater. Rev., 1994, 39, 24.
[14] B. Bhushan and X. Li: Int. Mater. Rev., 2003, 48, 125.
[15] X. Li, D. Diao and B. Bhushan: Acta Mater., 1997, 45, 4453.
[16] B. Bhushan and X. Li.: J. Mater. Res., 1997, 12, 54.
[17] K. Otsuka and X. Ren: Prog. Mater. Sci., 2005, 50, 511.
[18] A. Ishida, K. Ogawa, M. Sato and S. Miyazaki: Metall. Mater. Trans. A, 1997, 28, 1985.
[19] Y. Nakata, T. Tadaki, H. Sakamoto, A. Tanaka and K. Shimizu: J. Phys. IV, 1995, 5, C8-671.
[20] S. Kajiwara, T. Kikuchi, K. Okagawa, T. Matsunaga and S. Miyazaki: Phil. Mag. Lett., 1996, 74, 137.
[21] K.T. Liu and J.G. Duh: Surf. Coat. Technol., 2008, 202, 2737.
[22] Y.H. Lee and D. Kwon: Scripta Mater., 2003, 49, 459.
[23] S. Ko, D. Lee, S. Jee, H. Park, K. Lee and W. Hwang: Thin Solid Films, 2006, 515, 1932. |