An Improvement on Adhesion of Sputtered TiC Coating to Steel Substrate

Abstract

Abstract: Introducing N_2 during sputtering and pre-oxidation of substrate were investigated to improve the adhesion of sputtered TiC coating to steel substrate. The results show that yeactive gas N_2 increases the adhesion of TiC coating to steel because of a graded interface existing between coating and substrate. The interaction of discharge plasma with the surface of substrate was discussed. Pre-oxidation of substrate is effective for improving the adhesion due to the fomation of FeTi0_3 which appeared as an inteylayer between coating and pre-oxidized substrate.

Key words: Sputtering, adhesion strength, scratch test, interface (graded interface), pre-oxidizing

QI Zhenzhong;YAO Weiguo;WANG Yuqi;LIU Ling;JIA Junhui Institute of Solid State Physics, Academia Sinica, Hefei, China.. An Improvement on Adhesion of Sputtered TiC Coating to Steel Substrate[J]. J Mater Sci Technol, 1989, 5(2): 96-100.

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An Improvement on Adhesion of Sputtered TiC Coating to Steel Substrate

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