J. Mater. Sci. Technol. ›› 2022, Vol. 96: 94-102.DOI: 10.1016/j.jmst.2021.04.025

• Research Article • Previous Articles     Next Articles

Demonstration of synaptic and resistive switching characteristics in W/TiO2/HfO2/TaN memristor crossbar array for bioinspired neuromorphic computing

Muhammad Ismaila, Umesh Chandb, Chandreswar Mahataa, Jamel Nebhenc, Sungjun Kima,*()   

  1. aDivision of Electronics and Electrical Engineering, Dongguk University, Seoul 04620, South Korea
    bDepartment of Electrical and Computer Engineering, National University Singapore, Singapore 117583, Singapore
    cCollege of Computer Engineering and Sciences, Prince Sattam bin Abdulaziz University, Al-Kharj 11942, Saudi Arabia
  • Received:2020-11-25 Revised:2021-02-10 Accepted:2021-04-11 Published:2022-01-10 Online:2022-01-05
  • Contact: Sungjun Kim
  • About author:*E-mail address: sungjun@dongguk.edu (S. Kim).

Abstract:

In this study, resistive random-access memory (RRAM)-based crossbar arrays with a memristor W/TiO2/HfO2/TaN structure were fabricated through atomic layer deposition (ALD) to investigate synaptic plasticity and resistive switching (RS) characteristics for bioinspired neuromorphic computing. X-ray photoelectron spectroscopy (XPS) was employed to explore oxygen vacancy concentrations in bilayer TiO2/HfO2 films. Gaussian fitting for O1s peaks confirmed that the HfO2 layer contained a larger number of oxygen vacancies than the TiO2 layer. In addition, HfO2 had lower Gibbs free energy (ΔG°=-1010.8 kJ/mol) than the TiO2 layer (ΔG°=-924.0 kJ/mol), resulting in more oxygen vacancies in the HfO2 layer. XPS results and ΔG° magnitudes confirmed that formation/disruption of oxygen-based conductive filaments took place in the TiO2 layer. The W/TiO2/HfO2/TaN memristive device exhibited excellent and repeatable RS characteristics, including superb 103 dc switching cycles, outstanding 107 pulse endurance, and high-thermal stability (104 s at 125 °C) important for digital computing systems. Furthermore, some essential biological synaptic characteristics such as potentiation-depression plasticity, paired-pulse facilitation (PPF), and spike-timing-dependent plasticity (STDP, asymmetric Hebbian and asymmetric anti-Hebbian) were successfully mimicked herein using the crossbar-array memristive device. Based on experimental results, a migration and diffusion of oxygen vacancy based physical model is proposed to describe the synaptic plasticity and RS mechanism. This study demonstrates that the proposed W/TiO2/HfO2/TaN memristor crossbar-array has a significant potential for applications in non-volatile memory (NVM) and bioinspired neuromorphic systems.

Key words: Resistive switching, Crossbar-array memristive device, Synaptic plasticity, TiO2/HfO2 film, Oxygen vacancy