J. Mater. Sci. Technol. ›› 2025, Vol. 210: 246-253.DOI: 10.1016/j.jmst.2024.05.039

• Research Article • Previous Articles     Next Articles

Amorphous-to-crystalline transition-induced two-step thin film growth of quasi-one-dimensional penta-telluride ZrTe5

Yi Shuanga,*, Yuta Saitob,c,d, Shogo Hatayamad, Paul Fonse, Ando Daisukec, Yuji Sutoua,c,*   

  1. aWPI Advanced Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan;
    bResearch Center for Green X-Tech, Tohoku University, 6-6-11 Aoba-yama, Aoba-ku, Sendai 980-8579, Japan;
    cDepartment of Materials Science, Graduate School of Engineering, Tohoku University, 6-6-11 Aoba-yama, Sendai 980-8579, Japan;
    dDevice Technology Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, Umezono 1-1-1, Tsukuba 305-8568, Japan;
    eDepartment of Electronics and Electrical Engineering, Faculty of Science and Technology, Keio University, 3-14-1 Hiyoshi, Kohoku-ku, Yokohama, Kanagawa 223-8522, Japan
  • Received:2024-03-13 Revised:2024-05-12 Accepted:2024-05-12 Online:2024-06-08
  • Contact: *E-mail addresses: shuang.yi.e3@tohoku.ac.jp (Y. Shuang), ysutou@material.tohoku.ac.jp (Y. Sutou).

Abstract: Quasi-one-dimensional (quasi-1D) van der Waals (vdWs) materials, such as ZrTe5, exhibit unique electrical properties and quantum phenomena, making them attractive for advanced electronic applications. However, large-scale growth of ZrTe5 thin films presents challenges. We address this by employing sputtering, a common semiconductor industry technique. The as-deposited ZrTe5 film is amorphous, and post-annealing induces a crystallization process akin to transition-metal dichalcogenides. Our study investigates the electrical and optical properties during this amorphous-to-crystalline transition, revealing insights into the underlying mechanism. This work contributes to the fundamental understanding of quasi-1D materials and introduces a scalable fabrication method for ZrTe5 which offers the possibility of fabricating unique future electronic and optical devices.

Key words: Quasi-one-dimensional, ZrTe5, Large-scale, Thin film, Phase-change