Abstract: Although phase-change random-access memory (PCRAM) is a promising next-generation nonvolatile memory technology, challenges remain in terms of reducing energy consumption. This is primarily because the high thermal conductivities of phase-change materials (PCMs) promote Joule heating dissipation. Repeated phase transitions also induce long-range atomic diffusion, limiting the durability. To address these challenges, phase-change heterostructure (PCH) devices that incorporate confinement sublayers based on transition-metal dichalcogenide materials have been developed. In this study, we engineered a PCH device by integrating HfTe₂, which has low thermal conductivity and excellent stability, into the PCM to realize PCRAM with enhanced thermal efficiency and structural stability. HEAT simulations were conducted to validate the superior heat confinement in the programming region of the HfTe₂-based PCH device. Moreover, electrical measurements of the device demonstrated its outstanding performance, which was characterized by a low RESET current (∼1.6 mA), stable two-order ON/OFF ratio, and exceptional cycling endurance (∼2 × 10⁷). The structural integrity of the HfTe₂ confinement sublayer was confirmed using X-ray photoelectron spectroscopy and transmission electron microscopy. The material properties, including electrical conductivity, cohesive energy, and electronegativity, substantiated these findings. Collectively, these results revealed that the HfTe₂-based PCH device can achieve significant improvements in performance and reliability compared with conventional PCRAM devices.

Key words: Phase-change random-access memory, Phase-change heterostructure, Thermal efficiency, Thermal stability, Low-power operation