Removal Behaviors of Different SiC Ceramics during Polishing

J Mater Sci Technol ›› 2010, Vol. 26 ›› Issue (2): 125-130.

• High Temperature Structural Materials • Previous Articles Next Articles

Removal Behaviors of Different SiC Ceramics during Polishing

Guiling Liu, Zhengren Huang, Xuejian Liu, Dongliang Jiang

Structural Ceramics Center, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China

Received:2008-09-08 Revised:2009-01-05 Online:2010-02-28 Published:2010-02-28
Contact: Zhengren Huang
Supported by:
the Chinese National Defense Basic Research Project and the Innovation Project of Shanghai Institute of Ceramics,
Chinese Academy of Sciences.

Abstract

Abstract:

Comparative experiments were conducted to reveal the removal behaviors of three kinds of silicon carbide (SiC) ceramics during polishing and the effects of ceramic microstructure on the surface quality were also reported. Experimental results show that the second phase in SiC ceramics plays an important role in the surface quality when its size is large enough. The surface quality is enslaved to the formation of steps at interfaces between second phase and SiC matrix that results from different elastic modulus and hardness between two phases. Under 3 μm abrasive grains polishing condition, different SiC ceramics show different removal mechanisms. With decreasing abrasive grain size, all of different SiC ceramics exhibit a ductile removal mode, which decreases surface roughness effiently.

Key words: SiC, Surface quality, Removal behavior, Polishing

Guiling Liu, Zhengren Huang, Xuejian Liu, Dongliang Jiang. Removal Behaviors of Different SiC Ceramics during Polishing[J]. J Mater Sci Technol, 2010, 26(2): 125-130.

References

[1 ] N. Ebizuka, Y. Dai, H. Eto, W. Lin, T. Ebisuzaki, H. Omori, T. Handa, H. Takami and Y. Takahashi: Proc. SPIE, 2003, 4842, 329.
[2 ] A. Khounsary, P. Fernandez, L. Assou¯d, D. Mills, D. Walters, J. Schwartz and J. Robichaud: Rev. Sci. Instrum., 2002, 73, 1537.
[3 ] Y.M. Zhang, J.H. Zhang, J.C. Han, X.D. He and W. Yao: Mater. Lett., 2004, 58, 1204.
[4 ] Q.D. Wu, Y.G. Yan, B.J. Quo, M.J. Li and X.P. Liu: J. Inorg. Mater., 2004, 19, 302. (in Chinese)
[5 ] Y.X. Wang, S.H. Tan and D.L. Jiang: J. Inorg. Mater., 2004, 19, 456. (in Chinese)
[6 ] E. Volz, A. Roosen, W. Hartung and A. Winnacker: J. Eur. Ceram. Soc., 2001, 21, 2089.
[7 ] N. Zhang, H.Q. Ru, Q.K. Cai and X.D. Sun: Mater. Sci. Eng. A, 2008, 486, 262.
[8 ] S.H. Tan, Z.M. Chen and D.L. Jiang: J. Chin. Ceram. Soc., 1998, 26, 191. (in Chinese)
[9 ] Z.H. Zhou, S.H. Tan, D.L. Jiang and Y. Yi: Surf. Rev. Lett., 2005, 5-6, 799.
[10] G.L. Liu, Z.R. Huang, X.J. Liu and D.L. Jiang: J. Inorg. Mater., 2007, 22, 769. (in Chinese)
[11] T.G. Bifano, Y. Yi and W.K. Kahl: Precis. Eng., 1994, 2, 109.
[12] Y.C. Lin and C.H. Kao: Int. J. Adv. Manuf. Technol., 2005, 25, 40.
[13] J.S. Johnson, K.D. Grobsky and D. Bray: Proc. SPIE, 2002, 4771, 243.
[14] M. Murahara: Proc. SPIE, 2002, 4679, 69.
[15] X.F. Chen, X.G. Xu, J. Li, S.Z. Jiang, L. Ning, Y.M. Wang, D.Y. Ma, X.B. Hu and M.H. Jiang: J. Mater. Sci. Technol., 2007, 23(3), 430.
[16] H.H.K. Xu, N.P. Padture and S. Jahanmir: J. Am. Ceram. Soc., 1995, 78, 2443.
[17] N.P. Padture, C.J. Evans, H.H.K. Xu and B.R. Lawn: J. Am. Ceram. Soc., 1995, 78, 215.
[18] Y. Xie and B. Bhushan: Wear, 1996, 200, 281.
[19] B.R. Lawn, N.P. Padture, H.Cai and F. Guiberteau: Science, 1994, 263, 1114.
[20] T.G. Bifano, T.A. Dow and R.O. Scattergood: J. Eng. Ind., 1991, 113, 184.
[21] V.C. Venkatesh, S. Izman, S. Sharif, T.T. Mon and M. Konneh: Sadhana-Acad. Proc. Eng. Sci., 2003, 28, 915.

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Removal Behaviors of Different SiC Ceramics during Polishing

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