J Mater Sci Technol ›› 2010, Vol. 26 ›› Issue (12): 1133-1138.

• Novel Processing and Characterization Methods • Previous Articles     Next Articles

Micro- and Nano-structure Characterization of Isotropic Pyrocarbon Obtained via Chemical Vapor Deposition in Hot Wall Reactor

Kezhi Li, Dongsheng Zhang, Lingjun Guo, Hejun Li   

  1. State Key Laboratory of Solidi¯cation Processing, Northwestern Polytechnical University, Xi'an 710072, China
  • Received:2009-11-25 Revised:2010-03-10 Online:2010-12-31 Published:2010-12-21
  • Supported by:

    the National Natural Science Foundation of China under Grant Nos. 50832004 and 50972120, and the Program of Introducing Talents of Discipline to University under Grant No. D08040.

Abstract: The hot wall reactor was used to deposit isotropic pyrocarbon. The density of the product was measured by Archimedes method. The fracture morphology and texture of the product were investigated by scanning electron microscopy (SEM) and transmission electron microscopy (TEM). Raman spectroscopy was also applied to characterizing the structure of the product. The results show that the density of the product is about 1.31 g/cm3. The pyrocarbon consists of granular particles with the size of about 1.5 μm under SEM images. Under TEM images, the pyrocarbon is composed of irregular grains and onion-like particles are also detected. The orientation angle (180 deg.) of pyrocarbon reveals its isotropic character. The ID/IG ratio in Raman spectrum is about 1.2, indicating the isotropic feature of the product qualitatively.

Key words: Isotropic pyrocarbon, Chemical vapor deposition, Structure characterization, Onion-like pyrocarbon