Electron-beam irradiation induced optical transmittance enhancement for Au/ITO and ITO/Au/ITO multilayer thin films

doi:10.1016/j.jmst.2017.07.006

Abstract

Abstract:

Electron beam (EB) irradiation experiments on Au/ITO and ITO/Au/ITO multilayer thin films are reported. The structure and the optical-electrical properties of the samples were investigated by X-ray diffraction, atomic force microscopy, four-point probe resistivity measurement system, and UV-vis-NIR double beam spectrometer, respectively. Those results show that the EB irradiation has the effects of improving the crystalline of samples, widening the optical band gap of both thin films, reducing the sheet resistance, and improving the transmittance of samples.

Key words: EB irradiation, Multilayer thin films, Structure, Optical-electrical properties, Transmittance

Wei Wenzuo, Hong Ruijin, Wang Jinxia, Tao Chunxian, Zhang Dawei. Electron-beam irradiation induced optical transmittance enhancement for Au/ITO and ITO/Au/ITO multilayer thin films[J]. J. Mater. Sci. Technol., 2017, 33(10): 1107-1112.

Figures/Tables 8

Fig. 1. Schematic of (a) single ITO, (b) Au/ITO and (c) ITO/Au/ITO composite thin film structures.

Fig. 2. Representative XRD patterns of as-deposited and as-irradiated Au/ITO composite thin films before (a) and after (b) EB irradiation.

Fig. 3. Representative AFM images of as-deposited and as-irradiated samples: (a) as-deposited single ITO layer; (b) as-deposited Au/ITO; (c) as-deposited ITO/Au/ITO; (d) as-irradiated single ITO layer; (e) as-irradiated Au/ITO; (f) as-irradiated ITO/Au/ITO. Scan area is 3 × 3 μm for all samples.

Fig. 4. RMS of (a) Au/ITO and (b) ITO/Au/ITO multilayer films before and after EB irradiation.

Fig. 5. Transmittance of (a) single ITO, (b) Au/ITO and (c) ITO/Au/ITO multilayers before and after EB irradiation.

Fig. 6. Optical band gaps of (a) Au/ITO and (b) ITO/Au/ITO films before and after EB irradiation.

Fig. 7. Comparision of the sheet resistance between Au/ITO and ITO/Au/ITO thin films before and after EB irradiation.

Table 1 Figure of merit φTC ( × 10-5 Ω-1) of Au/ITO and ITO/Au/ITO multilayer before and after EB irradiation.

	Thickness of Au layer (nm)	5	10	15
Au/ITO	Before	18.2	49.1	17.8
Au/ITO	After	1.4	0.9	1.5
ITO/Au/ITO	Before	0.03	0.39	0.32
ITO/Au/ITO	After	1.87	0.41	0.58

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