J. Mater. Sci. Technol. ›› 2023, Vol. 141: 100-109.DOI: 10.1016/j.jmst.2022.09.016

• Research Article • Previous Articles     Next Articles

Optimization of electrical performance and stability of fully solution-driven α-InGaZnO thin-film transistors by graphene quantum dots

Xiaofen Xua, Gang Hea,*, Leini Wanga, Wenhao Wanga, Shanshan Jiangb, Zebo Fangc   

  1. aSchool of Materials Science and Engineering, Anhui University, Hefei 230601, China;
    bSchool of Integration Circuits, Anhui University, Hefei 230601, China;
    cSchool of Mathematical Information, Shaoxing University, Shaoxing 312000, China
  • Received:2022-07-11 Revised:2022-08-29 Accepted:2022-09-19 Published:2023-04-01 Online:2022-11-02
  • Contact: *E-mail address: hegang@ahu.edu.cn (G. He)

Abstract: This work presents solution-processed high-performance graphene quantum dots (GQDs) decorated amorphous InGaZnO (α-IGZO) thin-film transistors (TFTs) based on ZrOx as gate dielectrics. Compare with pure IGZO TFTs, GQDs-modified α-IGZO TFTs devices with optimized doping content have demonstrated better performances, including a larger field-effect mobility (μFE) of 35.91 cm2 V-1 s-1, a higher on/off current ratio (ION/IOFF) of 5.04 × 108, a smaller subthreshold swing (SS) of 0.11 V dec-1 and a smaller interfacial trap states (Dit, 1.57 × 1012 cm-2). Moreover, the GQDs-doped IGZO TFTs with a doping concentration of 0.5 mg ml-1 have shown excellent stability under bias stress and illumination stress conditions. To demonstrate the potential applications of α-IGZO TFTs in logic circuits, a resistor-loaded unipolar inverter based on GQDs-IGZO/ZrOx has been integrated, demonstrating good dynamic behavior and a high gain of 9.3. Low-frequency noise (LFN) characteristics of GQDs-IGZO/ZrOx TFTs have suggested that the fluctuations in mobility are the noise source. Based on all the experimental findings, it can be concluded that solution-processed GQDs-IGZO/ZrOx TFT may envision promising applications in optoelectronics.

Key words: Thin-film transistor, α-InGaZnO, Graphene quantum dots, Stability