Properties of ZnO Thin Films Grown on Si (100) Substrates by Pulsed Laser Deposition

Abstract

Abstract: ZnO thin films were grown on Si (100) substrates by pulsed laser deposition using a ZnO target. The substrate temperature was varied in the range of room temperature to 800°C, and the oxygen partial pressure of 0.1333 Pa (1 mTorr) to 1333 Pa (10 Torr). The properties of the resulting films were investigated by photoluminescence (PL), grazing incidence X-ray diffraction (GIXRD), X-ray photoelectron spectroscopy (XPS), and field emission scanning electron microscopy (FESEM). Based on the ultraviolet (UV, ~ 380 nm) to visible emission ratio in the PL spectrum, the optimum growth conditions were determined to be 600°C and 133.3 Pa (1 Torr), respectively. The oxygen 1s peak in the XPS spectrum was decomposed into two peaks. The peak at lower binding energy increased in intensity with the oxygen partial pressure from 0.1333 Pa (1 mTorr) to 133.3 Pa (1 Torr) while the other peak decreased. The GIXRD curve at the optimum condition showed strong two peaks (002) and (103). A strong correlation between the (103) peak intensity and the UV emission intensity was found.

Key words: ZnO, Pulsed laser deposition, Photoluminescence

Young Rae Jang Keon-Ho Yoo Seung Min Park. Properties of ZnO Thin Films Grown on Si (100) Substrates by Pulsed Laser Deposition[J]. J Mater Sci Technol, 2010, 26(11): 973-976.

References

[1 ] H.Y. Xu, Y.C. Liu, Y.X. Liu, C.S. Xu, C.L. Shao and R. Mu: Appl. Phys. B, 2005, 80, 871. [2 ] V. Vaithianathan, Y.H. Lee, B.T. Lee, S. Hishita and S.S. Kim: J. Cryst. Growth, 2006, 287, 85. [3 ] L. Chen, Z.Q. Chen, X.Z. Shang, C. Liu, S. Xu and Q. Fu: Solid State Commun., 2006, 137, 561. [4 ] F. Michelotti, A. Belardini, M.C. Larciprete, M. Bertolotti, A. Rousseau, A. Ratsimihety, G. Schoer and J. Mueller: Appl. Phys. Lett., 2003, 83, 4477. [5 ] E.J. Ibanga, C. Le Luyer and J. Mugnier: Mater. Chem. Phys., 2003, 80, 490. [6 ] K. Matsubara, P. Fons, K. Iwata, A. Yamada, K. Sakurai, H. Tampo and S. Niki: Thin Solid Films, 2003, 431-432, 369. [7 ] H. Nanto, T. Minami and S. Takata: J. Appl. Phys., 1986, 60, 482. [8 ] H. Kim, J.S. Horwitz, W.H. Kim, S.B. Qadri and Z.H. Kafa¯: Appl. Phys. Lett., 2003, 83, 3809. [9 ] S.Y. Chu, T.Y. Chen and W. Water: J. Vac. Sci. Technol. A, 2004, 22, 1087. [10] D.K. Hwang, H.S. Kim, J.H. Lim, J.Y. Oh, J.H. Yang, S.J. Park, K.K. Kim, D.C. Look and Y.S. Park: Appl. Phys. Lett., 2005, 86, 151917. [11] Y.I. Alivov, E.V. Kalinina, A.E. Cherenkov, D.C. Look, B.M. Ataev, A.K. Omaev, M.V. Chukichev and D.M. Bagnall: Appl. Phys. Lett., 2003, 83, 4719. [12] Y.M. Lu, H.W. Liang, D.Z. Shen, Z.Z. Zhang, J.Y. Zhang, D.X. Zhao, Y.C. Liu and X.W. Fan: J. Lumin., 2006, 119-120, 228. [13] Z.Q. Chen, S. Yamamoto, A. Kawasuso, Y. Xu and T. Sekiguchi: Appl. Surf. Sci., 2005, 244, 377. [15] M. Zerdali, S. Hamzaoui, F.H. Teherani and D. Rogers: Mater. Lett., 2006, 60, 504. [16] D.J. Rogers, F.H. Teherani, T. Monteiro, M. Soares, A. Neves, M. Carmo, S. Pereira, M.R. Correia, A. Lusson, E. Alves, N.P. Barradas, J.K. Morrod, K.A. Prior, P. Kung, A. Yasan and M. Razeghi: Phys. Status Solidi (c), 2006, 3, 1038. [17] N. Gopalakrishnan, B.C. Shin, H.S. Lim, G.Y. Kim and Y.S. Yu: Physica B, 2006, 376-377, 756. [18] J.S. Ha, C.H. Bae, S.H. Nam, S.M. Park, Y.R. Jang, K.H. Yoo and K. Park: Appl. Phys. Lett., 2003, 82, 3436. [19] E.G. Bylander: J. Appl. Phys., 1978, 49, 1188. [20] M. Liu, A.H. Kitai and P. Mascher: J. Lumin., 1992, 54, 35. [21] K. Vanheusden, W.L. Warren, C.H. Seager, D.R. Tallant, J.A. Voigt and B.E. Gnade: J. Appl. Phys., 1996, 79, 7983. [22] J.S. Kang, H.S. Kang, S.S. Pang, E.S. Shim and S.Y. Lee: Thin Solid Films, 2003, 443, 5. [23] Q.P. Wang, D.H. Zhang, Z.Y. Xue and X.J. Zhang: Opt. Mater., 2004, 26, 23. [24] Y.R. Jang, K.H. Yoo and S.M. Park: J. Korean Phys. Soc., 2008, 53, 110. [25] C. Liu, S.H. Chang, T.W. Noh, J.H. Song and J. Xie: Phys. Status Solidi (b), 2007, 244, 1528. [26] P.F. Zhang, X.L. Liu, H.Y.Wei, H.B. Fan, Z.M. Liang, P. Jin, S.Y. Yang, C.M. Jiao, Q.S. Zhu and Z.G.Wang: J. Phys. D: Appl. Phys., 2007, 40, 6010. [27] T. Okada, B.H. Agung and Y. Nakata: Appl. Phys. A, 2004, 79, 1417. [28] A.K. Pradhan, L. Douglas, H. Mustafa, R. Mundle, D. Hunter and C.E. Bonner: Appl. Phys. Lett., 2007, 90, 072108.

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