Abstract: Investigation by using LAS 3000 surface analysis system showed that the oxide of Fe, Cr,Al formed during oxidation were Cr_2O_3,Fe_2O_3 and Al_2O_3,but only small amount of nickel oxide was found. The composition of oxide layers for different oxidation durations varied in a similar way. In all cases,there exists an oxygen concentration peak in the composition profile of oxide layer. There is a transitional zone between oxide layer and alloy film.The thickness of oxide layer increases logarithmically with the time of oxida- tion.The ion plated Ni-Cr alloy film has very dense oxide layer and good oxidation resistance.

Key words: ion plating, alloy film, low temperature oxidation, kinetics of oxidation, surface analyses(ESCA spectra)