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Xiaofeng She, Hongtao Wang
Received:
2012-08-28
Revised:
2012-12-05
Online:
2014-04-15
Published:
2014-04-22
Contact:
H. Wang
Supported by:
Science Foundation of Chinese University (Grant No. 2011QNA4038), the Scientific Research Fund of Zhejiang Provincial Education Department (Grant No. Z200906194) and the Science and Technology Innovative Research Team of Zhejiang Province (No.2009R50010).
Xiaofeng She, Hongtao Wang. Thermal Stability of ALD Lanthanum Aluminate Thin Films on Si (100)[J]. J. Mater. Sci. Technol., DOI: 10.1016/j.jmst.2013.12.009.
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