J. Mater. Sci. Technol. ›› 2025, Vol. 234: 284-291.DOI: 10.1016/j.jmst.2025.02.036

• Research Article • Previous Articles     Next Articles

Enrichment of semiconducting single-wall carbon nanotubes by etching energy barrier engineering

Jia-Yang Zhanga,b, Lingtong Dingc,d, Meng-Ke Zoua,b, Lili Zhanga,b,*, Xin Lia,b, Zhong-Hai Jia,b, Xiao Wangc,d,*, Chang Liua,b,*   

  1. aSchool of Materials Science and Engineering, University of Science and Technology of China, Hefei 230026, China;
    bShenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China;
    cInstitute of Technology for Carbon Neutrality, Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, Shenzhen 518055, China;
    dFaculty of Materials Science and Engineering, Shenzhen University of Advanced Technology, Chinese Academy of Sciences, Shenzhen 518055, China
  • Received:2024-11-20 Revised:2025-01-16 Accepted:2025-02-10 Published:2025-11-01 Online:2025-03-28
  • Contact: *E-mail addresses: zhangll@imr.ac.cn (L. Zhang), xiao.wang@siat.ac.cn (X. Wang), cliu@imr.ac.cn (C. Liu).

Abstract: Horizontally aligned semiconducting single-wall carbon nanotube (s-SWCNT) arrays are ideal candidates for next-generation integrated circuits. However, the mainstream synthesis methods for obtaining s-SWCNTs mainly utilize the differences in structure and chemical reactivity between them and their metallic counterparts. These differences are too small to greatly improve their purity and reproducibility. Here we report an energy engineering strategy to expand the etching energy barrier difference of SWCNTs with different conductivities. In addition to density functional theory calculations on the energy barrier change, hydrogenation of single-wall carbon nanotubes (SWCNTs) by hydrogen plasma treatment and reversible dehydrogenation by annealing were realized experimentally. The structure-dependent hydrogenation and following selective oxidative etching of SWCNTs were demonstrated. As a result, horizontally aligned s-SWCNT arrays with high purity were obtained.

Key words: Single-wall carbon nanotube, Energy barrier engineering, Hydrogenation, Oxidative etching, Semiconducting