Properties of Evaporated Si_(1-x)Sn_x and Si_(1_x)Sn_x:H Amorphous Alloys

Abstract

Abstract: Amorphous Si_(1-x)Sn_x alloys have been prepared by co-evaporation onto substrates maintained at liquid nitrogen temperature. Their atomic structure is investigated using density measurements, scanning high-energy electron diffraction and Mossbauer spectroscopy. The optical and electrical properties are reported. Then, a method to hydrogenate the films during the evaporation process is described and applied to the preparation of amorphous semiconductors from pure silicon to pure tin. Finally, multilayers of type Si / Si:H / ... or Si:H / Si:D / ... are studied. The modulation of hydrogen is shown by low-angle neutron scattering and measurements of hydrogen diffusivity are presented.

Key words: amorphous alloy, evaporation, hydrogenation

M. Vergnat;M.Gerl+, Laboratoire de Métallurgie Physique et Science des Maériaux (U.R.A.au C.N.R.S.No. 155), Universite de Nancy 1, France. Properties of Evaporated Si_(1-x)Sn_x and Si_(1_x)Sn_x:H Amorphous Alloys[J]. J Mater Sci Technol, 1993, 9(2): 79-88.

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