J. Mater. Sci. Technol. ›› 2023, Vol. 150: 138-144.DOI: 10.1016/j.jmst.2022.11.055

• Research Article • Previous Articles     Next Articles

Laser-induced inverted patterning of nanocrystals embedded glass for micro-light-emitting diodes

Yuzhou Hua, Ying Yea, Wenchao Zhanga, Kai Lia, Yao Zhoua, Yudong Zhanga, Zhao Dengb, Jianjun Hana, Xiujian Zhaoa, Chao Liua,*   

  1. aState Key Laboratory of Silicate Materials for Architectures, Wuhan University of Technology, Wuhan 430070, China;
    bState Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China
  • Received:2022-10-27 Revised:2022-11-22 Accepted:2022-11-23 Published:2023-07-01 Online:2023-02-10
  • Contact: * E-mail address: thite@whut.edu.cn (C. Liu).

Abstract: High resolution and full-color light-emitting diodes require precise and efficient patterning of light-emitting structures containing quantum dots or nanocrystals. We report light-induced inverted patterning of nanocrystals in glasses for micro-light-emitting diodes. Ultrafast laser pulse induces structural destruction and amorphization of nanocrystals in glasses, forming inverted luminescent patterns. High-throughput patterning of micrometer-scale, thermally stable, and highly photoluminescent structures in nanocrystals embedded glass is realized. This patterning method provides a novel way to fabricate high-performance and ultrahigh-resolution color conversion layers for micrometer-scale light-emitting diodes.

Key words: Nanocrystals, Ultrafast laser, Sub-micro patterning, Micro-light-emitting-diodes