J. Mater. Sci. Technol. ›› 2022, Vol. 104: 127-130.DOI: 10.1016/j.jmst.2021.06.061

• Research Article • Previous Articles     Next Articles

A silicon-graphene-silicon transistor with an improved current gain

Chi Liua, Xu-Qi Yanga,b, Wei Maa,b, Xin-Zhe Wanga,b, Hai-Yan Jianga,b, Wen-Cai Rena,b, Dong-Ming Suna,b,*()   

  1. aShenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, 72 Wenhua Road, Shenyang 110016, China
    bSchool of Material Science and Engineering, University of Science and Technology of China, 72 Wenhua Road, Shenyang 110016, China
  • Received:2021-05-20 Revised:2021-06-28 Accepted:2021-06-29 Published:2022-03-30 Online:2022-03-30
  • Contact: Dong-Ming Sun
  • About author:* Chinese Academy of Sciences, Institute of Metal Re-search, Shenyang 110016, China. E-mail address: dmsun@imr.ac.cn (D.-M. Sun).
    First author contact:

    1 These authors contributed equally to this work: Chi Liu, Xu-Qi Yang.

Abstract:

In history, semiconductor-metal-semiconductor transistor (SMST) was proposed for frequency improvement. However, a general fabrication method is still missing due to the unsolved technological problem of deposition of a general crystalline semiconductor on metal, and a thinner metal base is also difficult to be fabricated with high quality. Recently, due to the atomic thickness of graphene, the concept of semiconductor-graphene-semiconductor transistor (SGST) has emerged which leads to the renaissance of SMST, however the experimental study is in its infancy. In this letter, SMST and SGST are fabricated using Si membrane transfer. It is found the common base current gain can be improved from about 0.5% in a Si-Au-Si transistor to about 1% in a Si-Gr-Ge one, and to above 10% in a Si-Gr-Si one, which is attributed to both the ultra-thin thickness and the quantum capacitance effect of graphene.

Key words: Semiconductor metal semiconductor transistor, Graphene base transistor, Graphene base heterojunction transistor