J Mater Sci Technol ›› 2010, Vol. 26 ›› Issue (3): 206-210.

• Thin Film and Coatings • Previous Articles     Next Articles

Effect of Bi2Ti2O7 Seeding Layer on Capacitance-voltage Properties of Bi3:54Nd0:46Ti3O12 Films

Huizhong Xu, Liang Zhen, Changhong Yang, Zhuo Wang   

  1. 1) School of Materials Science and Engineering, Harbin Institute of Technology, Harbin 150001, China
    2) School of Environment and Materials Engineering, Yantai University, Yantai 264005, China
  • Received:2008-11-03 Revised:2009-11-27 Online:2010-03-28 Published:2010-03-22
  • Contact: Liang Zhen

Abstract:

Au/Bi3:54Nd0:46Ti3O12/Bi2Ti2O7/Si structure has been fabricated with a preferentially (111)-orientated Bi2Ti2O7 seeding layer as a ferroelectric gate of metal-ferroelectric-insulator ¯eld e®ect transistor. Bi3:54Nd0:46Ti3O12 and Bi3:54Nd0:46Ti3O12/Bi2Ti2O7 ¯lms are both well-crystallized when annealed at 680±C for 40 min, and have smooth, dense and crack-free surfaces. The width of memory window of the ferroelectric gate increases with increasing electric ¯eld applied to the Bi3:54Nd0:46Ti3O12 thin ¯lms. The width of memory window of Au/Bi3:54Nd0:46Ti3O12/Bi2Ti2O7/Si with seeding layer is relatively wider than that of Au/Bi3:54Nd0:46Ti3O12/Si at the same bias voltage, and the counterclockwise hysteresis curve of Au/Bi3:54Nd0:46Ti3O12/Bi2Ti2O7/Si is referred to as polarization type switching at di®erent voltages. Bi2Ti2O7 seeding layer plays an important role in alleviating the element interdi®usion between Bi3:54Nd0:46Ti3O12 and Si.

Key words: Metalorganic decomposition, Bismuth titanate, Ferroelectric materials