J Mater Sci Technol ›› 1998, Vol. 14 ›› Issue (1): 80-82.

• Articles • Previous Articles     Next Articles

Low Temperature Synthesis of Diamond Films by CVD of Combined Lasers

Zhongchao FENG; Yan ZHAO; Binchun ZHANG; Yaqing WANG and Zhengang WU (Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110015, China)   

  • Received:1998-01-28 Revised:1998-01-28 Online:1998-01-28 Published:2009-10-10

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Abstract: Diamond films have been synthesized by means of LCVD through combined effects of a XeCl ultraviolet laser and an infrared CO2 laser. A special apparatus has been developed. The conditions of synthesis and the roles played by both lasers were studied. High-purity diamond films were deposited on Si substrates at 340℃.

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