J Mater Sci Technol ›› 1997, Vol. 13 ›› Issue (4): 245-248.

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Mechanical Properties of Polycrystalline TiN/TaN Multilayers

W.H.Soe and R.Yamamoto(Institute of Industrial Science, University of Tokyo, 7-22-1 Roppongi, Minato-ku, Tokyo 106, Japan )   

  • Received:1997-07-28 Revised:1997-07-28 Online:1997-07-28 Published:2009-10-10

Abstract: Polycrystalline TiN/TaN multilayers were grown by reactive magnetron sputtering on WC-Co sintered hard alloy Substrates. Multilayer structure and composition modulation amplitudes were studied using X-ray diffraction method. Hardness and elastic modulus were measured by nanoindentation tester. For A>8.0 nm, hardness is lower than rule-of mixtures value of individual single layer, and increased rapidly with decreasing A, peaking at hardness values≈33% higher than that at A=4.3 nm. As a result of analysing the inclination of applied load for indenter displacement on P-h curve (△P/△h), this paper exhibits that the enhancement of the resistance to dislocation motion and elastic anomaly due to coherency strains are responsibie for the hardness change