High coercive NdFeB thin film obtained by diffusion annealing

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J Mater Sci Technol ›› 2000, Vol. 16 ›› Issue (02): 111-112.

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High coercive NdFeB thin film obtained by diffusion annealing

MJ.Kim, Y.B.Kim, C.B.Song, Y.Li, D.S.Suhr, C.O.Kim, T.K.Kim

Korea Research Institute of Standards and Science, Taejon 305-600, Korea...

Received:1999-07-12 Revised:1999-08-25 Online:2000-03-28 Published:2009-10-10
Contact: Y.B.Kim

Abstract

Abstract: The magnetic properties and microstructure of diffusion annealed [Ta/Nd/NdFeB/Nd/Ta] thin films have been investigated. The films were deposited on Si substrate with various thickness ratio of Nd/NdFeB layer (R=0 similar to 3.3), then diffused and crystallized by annealing at 650 degrees C for 10 min. The film without Nd layer showed soft magnetic behavior and high content of alpha-Fe phase. The films with R greater than or equal to 1 showed good hard magnetic properties with the high coercivity of about 20 kOe.

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MJ.Kim, Y.B.Kim, C.B.Song, Y.Li, D.S.Suhr, C.O.Kim, T.K.Kim. High coercive NdFeB thin film obtained by diffusion annealing[J]. J Mater Sci Technol, 2000, 16(02): 111-112.

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High coercive NdFeB thin film obtained by diffusion annealing

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