Size effect of electromagnetic constitutive characteristics of ultrathin Al films

J Mater Sci Technol ›› 2000, Vol. 16 ›› Issue (05): 540-542.

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Size effect of electromagnetic constitutive characteristics of ultrathin Al films

Xuedong BAI, Meng CHEN, Lishi WEN, R.F.Huang

Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110015, China...

Received:1999-07-07 Revised:1999-11-16 Online:2000-09-28 Published:2009-10-10
Contact: Xuedong BAI

Abstract

Abstract: The ultrathin aluminum films with thickness in the range of 2 similar to 60 nm have been deposited by de magnetron sputtering apparatus. Reflectance and transmittance of the obtained samples were measured with a WFZ-900-D4 UV/VIS spectrophotometer. The optical constant (n, k) and permittivity (epsilon', epsilon ") were determined by applying Newton-Simpson recurrent substitution method. The results indicate that the electromagnetic constitutive characteristic of ultrathin aluminum films is a function of thickness and has obvious size effect.

Key words:

Xuedong BAI, Meng CHEN, Lishi WEN, R.F.Huang. Size effect of electromagnetic constitutive characteristics of ultrathin Al films[J]. J Mater Sci Technol, 2000, 16(05): 540-542.

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Size effect of electromagnetic constitutive characteristics of ultrathin Al films

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