Abstract: In this paper, for the first time, Ca1-xLnxSiO3 (Ln=Y. La, x=0.1, 0.2) was synthesized with three methods of high temperature (HT) under atmospheric pressure (AP), high temperature (HT) combined with high pressure (HP) and sol-gel method. The sample obtained at the stable range of 4.3-5.0 GPa pressure and 1050-1100℃ temperature with HT and HP method has a cubic perovskite structure, which has the minimum lattice parameter of 0.3535 nm so far,the sample with triclinic structure was obtained by sintering at atmosphere, and the sample synthesized with sol-gel method has monoclinic structure. SEM analysis shows that rare earth ions take the lattice site of Ca, but the distribution of rare earth ions in the samples synthesized with HT and HP is not homogeneous.