Research Laboratory for High Density Optical Storage, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

TeOx thin films were prepared by vacuum evaporation of TeO2 powder. Structural characteristic and surface morphology of the as-deposited films was analyzed by using X-ray photoelectron spectroscopy, transmission electron microscopy, X-ray diffractometer and atomic force microscopy. It was found that the films represented a two-component system comprising Te particles dispersed in an amorphous TeO¬2 matrix. The dispersed Te particles were in a crystalline state. The TeO¬x films showed a finely granular structure and a rough surface. Results of the static recording test showed that the TeO¬x films had good writing sensitivity for short-wavelength laser beam (514.5 nm). Primary results of the dynamic test at 514.5 nm were also reported. The TeO¬x films were suitable for using as a blue-green wavelength high density optical storage medium.