J. Mater. Sci. Technol. ›› 2010, Vol. 26 ›› Issue (11): 967-972.

• Research Articles • 上一篇    下一篇

Influence of Nitrogen Flow Rate on the Microstructure and Properties of N and Me (Me=Cr,Zr) Co-doped Diamond-like Carbon Films

李红凯1,董闯2,林国强3   

  1. 1. 大连理工大学三束材料改性实验室
    2.
    3. 大连理工大学
  • 收稿日期:2009-12-29 修回日期:2010-04-29 出版日期:2010-11-30 发布日期:2010-11-22
  • 通讯作者: 李红凯
  • 基金资助:

    国家高技术研究发展计划（863）

Influence of Nitrogen Flow Rate on the Microstructure and Properties of N and Me (Me=Cr, Zr) Co-doped Diamond-like Carbon Films

Zhiyun Han, Hongkai Li, Guoqiang Lin, Chuang Dong   

  1. Key Laboratory for Material Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian 116085, China
  • Received:2009-12-29 Revised:2010-04-29 Online:2010-11-30 Published:2010-11-22
  • Contact: Guoqiang Lin
  • Supported by:

    the National High Technical Research and Development Program of China (Grant No. 2006AA03Z521)

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摘要： In this paper, Me (Me=Cr, Zr) and N co-doped diamond like carbon (DLC-MeN) composite films were prepared on cemented carbide substrates using pulsed bias arc ion plating. The effect of nitrogen flow rates on the microstrucute and properties of the films were investigated by scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS), Raman spectra, grazing incident X-ray diffraction (GIXRD) and nano-indentation, respectively. Raman and GIXRD results show that the deposited films are nanocomposite films with MeN nanocrystalline phase imbedded within DLC amorphous matrix, which are vital for the mechanical properties of the films. The nitrogen flow rates have significant effect on the compositions and structures and hence on the hardness and elastic modulus of the films, and increasing nitrogen flow rate decrease drastically the hardness and elastic modulus of the films.

关键词: Diamond like carbon films, doping, Nitrogen flow rate, Arc ion plating

Abstract: In this paper, Me (Me=Cr, Zr) and N co-doped diamond like carbon (DLC-MeN) composite films were prepared on cemented carbide substrates by pulsed bias arc ion plating. The effect of nitrogen flow rates on the microstructure and properties of the films were investigated by X-ray photoelectron spectroscopy (XPS), Raman spectra, grazing incident X-ray diffraction (GIXRD), high resolution transmission electron microscopy (HRTEM) and nano-indentation. Raman, GIXRD and HRTEM results show that the deposited films are nanocomposite films with MeN nanocrystalline phase embedded within DLC amorphous matrix, which are vital for the mechanical properties of the films. The nitrogen flow rate has significant effect on the compositions and structures and hence on the hardness and elastic modulus of the films, and increasing nitrogen flow rate decreases drastically the hardness and elastic modulus of the films.

Key words: Diamond like carbon films, Doping, Nitrogen flow rate, Arc ion plating