Super Hardness of Nanocrystalline Tungsten Thin Films

J. Mater. Sci. Technol. ›› 2010, Vol. 26 ›› Issue (1): 87-92.

• Research Articles • 上一篇下一篇

Super Hardness of Nanocrystalline Tungsten Thin Films

Sun Hao linag¹;F Ma²;Z X Song²;Ke Wei Xu²

1. 西安交通大学;材料科学与工程学院
2.

收稿日期:2008-09-16 修回日期:2009-03-12 出版日期:2010-01-31 发布日期:2010-01-22
通讯作者: Sun Hao linag
基金资助:
国家杰出青年科学基金;国家重点基础研究发展规划（973）;国家自然科学基金

Microstructure and Mechanical Properties of Nanocrystalline Tungsten Thin Films

H.L. Sun, Z.X. Song, D.G. Guo, F. Ma, K.W. Xu

State Key Laboratory for Mechanical Behavior of Materials, School of Materials Science and Engineering, Xi0an Jiaotong University, Xi'an 710049, China

Received:2008-09-16 Revised:2009-03-12 Online:2010-01-31 Published:2010-01-22
Supported by:
the National Basic Research Program of China (No. 2004CB619302)
the National Natural Science Foundation of China (No. 50871083, 50771078 and 50771069)

摘要/Abstract

Abstract:

Tungsten (W) thin films were prepared by magnetron sputtering onto Si (100) substrates. Their microstructures were characterized by X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM) and transmission electron microscopy (TEM). The hardness and modulus were evaluated by nanoindentation. It is found that a 30 nm Cr sticking layer induces structure changes of deposited W film from β-W to α-W structure. In addition, remarkable hardness enhancement both for the deposited and annealed W films, were compared with that of bulk coarse-grained W, although their nanoindentation modulus is very close to that of corresponding bulk W. The intrinsic reasons that lead to structure changes and super hardness are discussed.

Key words: Tungsten film, Microstructure, Nanoindentation, Hardness, Modulus

Sun Hao linag F Ma Z X Song Ke Wei Xu. Super Hardness of Nanocrystalline Tungsten Thin Films[J]. J. Mater. Sci. Technol., 2010, 26(1): 87-92.

H.L. Sun Z.X. Song D.G. Guo F. Ma K.W. Xu. Microstructure and Mechanical Properties of Nanocrystalline Tungsten Thin Films[J]. J Mater Sci Technol, 2010, 26(1): 87-92.

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Super Hardness of Nanocrystalline Tungsten Thin Films

Microstructure and Mechanical Properties of Nanocrystalline Tungsten Thin Films

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