Robust ultrathin and transparent AZO/Ag-SnOx/AZO on polyimide substrate for flexible thin film heater with temperature over 400 °C

doi:10.1016/j.jmst.2020.01.058

材料科学与技术 ›› 2020, Vol. 48 ›› Issue (0): 156-162.DOI: 10.1016/j.jmst.2020.01.058

收稿日期:2019-10-08 接受日期:2020-01-28 出版日期:2020-07-01 发布日期:2020-07-13

Robust ultrathin and transparent AZO/Ag-SnO_x/AZO on polyimide substrate for flexible thin film heater with temperature over 400 °C

Zhaozhao Wang^a^,^b, Jia Li^a^,^*(), Junjun Xu^a^,^b, Jinhua Huang^b, Ye Yang^b, Ruiqin Tan^c, Guofei Chen^b, Xingzhong Fang^b, Yue Zhao^a, Weijie Song^b^,^d^,^**()

^a School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China
^b Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China
^c Faculty of Information and Computer Science, Ningbo University, Ningbo 315211, China
^d Jiangsu Collaborative Innovation Center of Photovoltaic Science and Engineering, Changzhou 213164, China

Received:2019-10-08 Accepted:2020-01-28 Online:2020-07-01 Published:2020-07-13
Contact: Jia Li,Weijie Song

摘要/Abstract

Abstract:

We developed flexible and transparent thin film heaters (TFHs) with a structure of AZO/Ag-SnO_x/AZO/polyimide (PI) which exhibited superior stability under operational conditions. Ultrathin and robust doped silver (Ag) films were produced by introducing a small amount of SnO_x during the sputtering process. The AZO/Ag-SnO_x/AZO stacks showed the best figure of merit value of 139.9, which was higher than that of ITO counterpart (25.5) with the same thickness. In addition, it exhibited excellent durability, which showed unaffected optical and electrical properties under the heat treatment of 500 °C for 30 min in air, highly-accelerated temperature and humidity stress test (HAST) at 121 °C and 97%RH for 36 h, 10,000 times of scratching and 1500 times of inner and outer bending test. Furthermore, the TFHs based on AZO/Ag-SnO_x/AZO/PI achieved a high temperature of 438.8 °C with response time in several seconds, which outperformed most previous studies. The robust high-temperature TFHs in this research hold promising commercial applications in flexible and high temperature occasions.

Key words: Ultrathin Ag films, SnOx Doping, Durability, High temperature thin film heater

. [J]. 材料科学与技术, 2020, 48(0): 156-162.

Zhaozhao Wang, Jia Li, Junjun Xu, Jinhua Huang, Ye Yang, Ruiqin Tan, Guofei Chen, Xingzhong Fang, Yue Zhao, Weijie Song. Robust ultrathin and transparent AZO/Ag-SnO_x/AZO on polyimide substrate for flexible thin film heater with temperature over 400 °C[J]. J. Mater. Sci. Technol., 2020, 48(0): 156-162.

图/表 6

Fig. 1. Schematic diagram of the fabrication process of TFHs based on AZO/Ag-SnOx/AZO and ITO thin films.

Fig. 2. (a) Transmittance spectra, (b) sheet resistance and FOM of PI/AZO/Ag-SnOx/AZO with different Ag thicknesses; AFM images of (c) pure PI and (d) PI/AZO/Ag-SnOx/AZO thin film. XPS profiles of (e) overall spectra, (f) Ag 3d and (g) Sn 3d of AZO/Ag (40 nm/10 nm) and AZO/Ag-SnOx (40 nm/10 nm) thin films.

Fig. 3. (a) Change in sheet resistance of Ag-SnOx and AZO/Ag-SnOx/AZO thin films; (b) Images of AZO/Ag-SnOx/AZO thin film, upper: as deposited, and lower: after heated at 300 ℃ for 30 min; (c-f) Fluorescence microscope images of AZO/Ag-SnOx/AZO thin films for 12-36 h HAST, and AZO/Ag/AZO thin film for 24 h HAST; (g) Sheet resistance and (h) transmittance spectra of AZO/Ag-SnOx/AZO thin film with different hours for HAST.

Fig. 4. (a) AZO/Ag/AZO and AZO/Ag-SnOx/AZO thin films’ shedding area as a function of number of scratches. Inset picture is schematic diagrams of architectural paint scrubber. (b) Change in sheet resistance of AZO/Ag-SnOx/AZO thin film as a function of bending cycles.

Fig. 5. (a) Temperature profile of AZO/Ag-SnOx/AZO-based TFH under operation at different input voltages. The inset is an infrared thermal image of TFH at 16 V. (b) Heating cycles at 10 V. (c) Temperature profiles of AZO/Ag-SnOx/AZO-based TFH and ITO-based TFH at the same DC input power of 10 V. (d) Peak temperature as a function of voltage for AZO/Ag-SnOx/AZO-based and ITO-based TFHs.

Fig. 6. Maximum temperature obtained as a function of TFOM and response times for AZO/Ag-SnOx/AZO-based and ITO-based TFHs compared with other work.

参考文献 39

[1]	E.H. Ko, H.J. Kim, S.J. Lee, J.H. Lee, H.K. Kim, RSC Adv. 6 (2016) 46634-46642.
[2]	S.M. Lee, S. Oh, S.T. Chang, ACS Appl. Mater. Interf. 11 (2019) 4541-4550.
[3]	P. Zhao, S. Kim, S. Yoon, P. Song, Thin Solid Films 665 ( 2018) 137-142.
[4]	J. Yun, W. Wang, T.S. Bae, Y.H. Park, Y.C. Kang, D.H. Kim, S. Lee, G.H. Lee, M. Song, J.W. Kang, ACS Appl. Mater. Interf. 5 (2013) 9933-9941.
[5]	L. Cattin, J.C. Bernède, M. Morsli, Physica Status Solidi A Appl. Res. 210 (2013) 1047-1061.
[6]	H.W. Lu, C.W. Huang, P.C. Kao, S.Y. Chu, Appl. Surf. Sci. 347 (2015) 116-121.
[7]	Y.H. Yoon, J.W. Song, D. Kim, J. Kim, J.K. Park, S.K. Oh, C.S. Han, Adv. Mater. 19 (2007) 4284-4287.
[8]	W. Xu, Q. Xu, Q. Huang, R. Tan, W. Shen, W. Song, Mater. Sci. Technol. 32 (2016) 158-161.
[9]	T. Kim, Y.W. Kim, H.S. Lee, H. Kim, W.S. Yang, K.S. Suh, Adv. Funct. Mater. 23 (2013) 1250-1255.
[10]	K.D.M. Rao, G.U. Kulkarni, Nanoscale 6 ( 2014) 5645-5651. DOI URL PMID
[11]	M. Girtan, Sol. Energy Mater. Sol. Cells 100 ( 2012) 153-161.
[12]	Y. Cho, N.S. Parmar, S. Nahm, J.W. Choi, J. Alloys. Compd. 694 (2017) 217-222.
[13]	N. Formica, D.S. Ghosh, A. Carrilero, T.L. Chen, R.E. Simpson, V. Pruneri, ACSAppl. Mater. Interf. 5 (2013) 3048-3053.
[14]	G. Zhao, W. Shen, E. Jeong, S.G. Lee, S.M. Yu, T.S. Bae, G.H. Lee, S.Z. Han, J. Tang, E.A. Choi, J. Yun, ACS Appl. Mater. Interf. 10 (2018) 27510-27520.
[15]	G. Zhao, W. Wang, T.S. Bae, S.G. Lee, C. Mun, S. Lee, H. Yu, G.H. Lee, M. Song, J. Yun, Nat. Commun. 6 (2015) 8830. URL PMID
[16]	S.H. Cho, W.J. Lee, J. Appl. Phys. 49 (2010), 111102.
[17]	H.S. Roh, S.H. Cho, W.J. Lee, Physica Status Solidi A Appl. Res. 207 (2010) 1558-1562.
[18]	H.J. Kim, K.W. Seo, H.K. Kim, Y.J. Noh, S.I. Na, J. Vac. Sci. Technol. A 325 ( 2014), 051507.
[19]	C. Zhang, D. Zhao, D. Gu, H. Kim, T. Ling, Y.K. Wu, L.J. Guo, Adv. Mater 26 ( 2014) 5696-5701. URL PMID
[20]	G. Zhao, S.M. Kim, S.G. Lee, T.S. Bae, C. Mun, S. Lee, H. Yu, G.H. Lee, H.S. Lee, M. Song, J. Yun, Adv. Funct. Mater. 26 (2016) 4180-4191. DOI URL
[21]	W. Wang, M. Song, T.S. Bae, Y.H. Park, Y.C. Kang, S.G. Lee, S.Y. Kim, D.H. Kim, S. Lee, G. Min, G.H. Lee, J.W. Kang, J. Yun, Adv. Funct. Mater. 24 (2014) 1551-1561. DOI URL
[22]	N. Formica, D.S. Ghosh, T.L. Chen, C. Eickhoff, I. Bruder, V. Pruneri, Sol. EnergyMater. Sol. Cells 107 ( 2012) 63-68.
[23]	M. Hasegawa, D. Hirano, M. Fujii, M. Haga, E. Takezawa, S. Yamaguchi, A. Ishikawa, T. Kagayama, J. Polym. Sci. Part A: Polym. Chem. 51 (2013) 575-592. DOI URL
[24]	S.Y. Heo, H.J. Choi, B.J. Park, J.H. Um, H.J. Jung, J.R. Jeong, S.G. Yoon, Sens. Actuators A Phys. 221 (2015) 131-138. DOI URL
[25]	S.M. Amininasab, S. Esmaili, M. Taghavi, Z. Shami, J. Fluorine Chem. 192 (2016) 48-57. DOI URL
[26]	S.A. Tharakan, S. Raju, R. Balasubramaniam, S. Muthusamy, Polym. Compos. 40 (2018) 832-843. DOI URL
[27]	A.I. Hofmann, E. Cloutet, G. Hadziioannou, Adv. Electron. Mater. 4 (2018), 1700412. DOI URL
[28]	L.H. Tjeng, M.B.J. Meinders, J. van Elp, J. Ghijsen, G.A. Sawatzky, R.L. Johnson, Phys. Rev. B 41 ( 1990) 3190-3199. DOI URL
[29]	M.A. Stranick, A. Moskwa, Surf. Sci. Spectra 2 ( 1993) 45-49. DOI URL
[30]	Y. Sugimoto, K. Igarashi, S. Shirasaki, A. Kikuchi, J. Appl. Phys. 55 ( 2016), 04EJ15. DOI URL
[31]	J.H. Kwon, Y. Jeon, K.C. Choi, ACS Appl. Mater. Interf. 10 (2018) 32387-32396.
[32]	E. Ando, S. Suzuki, N. Aomine, M. Miyazaki, M. Tada, Vacuum 59 ( 2000) 792-799. DOI URL
[33]	J. Huang, X. Liu, Y. Lu, Y. Zhou, J. Xu, J. Li, H. Wang, J. Fang, Y. Yang, W. Wang, R. Tan, W. Song, Sol. Energy Mater. Sol. Cells 184 ( 2018) 73-81. DOI URL
[34]	R. Gupta, K.D. Rao, S. Kiruthika, G.U. Kulkarni, ACS Appl. Mater. Interf. 8 (2016) 12559-12575. DOI URL
[35]	S. Sorel, D. Bellet, J.N. Coleman, ACS Nano 8 ( 2014) 4805-4814. URL PMID
[36]	H.S. Jang, S.K. Jeon, S.H. Nahm, Carbon 49 ( 2011) 111-116. DOI URL
[37]	D. Sui, Y. Huang, L. Huang, J. Liang, Y. Ma, Y. Chen, Small 7 ( 2011) 3186-3192. URL PMID
[38]	C. Celle, C. Mayousse, E. Moreau, H. Basti, A. Carella, J.P. Simonato, Nano Res. 5 (2012) 427-433. DOI URL
[39]	R. Gupta, S. Walia, M. Hösel, J. Jensen, D. Angmo, F.C. Krebs, G.U. Kulkarni, J. Mater. Chem. A Mater. Energy Sustain. 2 (2014) 10930. DOI URL

Robust ultrathin and transparent AZO/Ag-SnO_x/AZO on polyimide substrate for flexible thin film heater with temperature over 400 °C

RichHTML

PDF (PC)

可视化

摘要/Abstract

引用本文

使用本文

图/表 6

参考文献 39

相关文章 0

编辑推荐

Metrics

本文评价