J. Mater. Sci. Technol. ›› 2009, Vol. 25 ›› Issue (01): 119-122.
Fabrication and Properties of DC Magnetron Sputtered Indium Tin Oxide on Flexible Plastic Substrate
林慧
- State Key Laboratory of Electronic Thin Films and Integrated Devices; School of Optoelectronic Information; University
of Electronic Science and Technology of China (UESTC); Chengdu 610054; China
Fabrication and Properties of DC Magnetron Sputtered Indium Tin Oxide on Flexible Plastic Substrate
Hui Lin, Junsheng Yu†, Nana Wang, Shuangling Lou and Yadong Jiang
- State Key Laboratory of Electronic Thin Films and Integrated Devices, School of Optoelectronic Information, University
of Electronic Science and Technology of China (UESTC), Chengdu 610054, China
摘要：
Indium tin oxide (ITO) thin films deposited on flexible polyethylene terephthalate (PET) substrates at low temperature by DC magnetron sputtering from an In-Sn (90{10 wt pct) alloy target were studied. The correla- tion between deposition conditions and ITO property was systematically investigated and characterized. These as-deposited ITO films were used as the anode contact for flexible organic light-emitting diodes (FOLEDs). The fabricated FOLEDs with a structure of PET/ITO/NPB (50 nm)/Alq (20 nm)/Mg:Ag (100 nm) showed a maximum luminance of 2125 cd/m2 at 13 V.