Influence of Ar/N2 Flow Rate on Structure and Property for TaN/NbN Multilayered Coatings

J. Mater. Sci. Technol. ›› 2007, Vol. 23 ›› Issue (04): 461-464.

Influence of Ar/N2 Flow Rate on Structure and Property for TaN/NbN Multilayered Coatings

李德军;张学华;曹猛;杨谨;刘桐

天津师范大学

收稿日期:2006-10-11 修回日期:2007-04-09 出版日期:2007-07-28 发布日期:2009-10-10
通讯作者: 李德军

Influence of Ar/N2 Flow Rate on Structure and Property for TaN/NbN Multilayered Coatings

Xuehua ZHANG, Yuanbin KANG, Sipeng LIU, Qiang LI, Ying YANG, Xiangyun DENG, Dejun LI

College of Physics and Electronic Information Science, Tianjin Normal University, Tianjin 300074, China

Received:2006-10-11 Revised:2007-04-09 Online:2007-07-28 Published:2009-10-10
Contact: Dejun LI

摘要/Abstract

关键词: 射频磁控溅射, TaN/NbN多层膜, 纳米尺度

Abstract: TaN/NbN multilayered coatings with nanoscale bilayer periods were synthesized at different Ar/N2 flow rate by r.f. magnetron sputtering. XRD and nano indenter were employed to investigate the influence of Ar/N2 flow rate on microstructure and mechanical properties of the coatings. The low-angle XRD pattern indicated a well-defined composition modulation and layer structure of the multilayered coating. All multilayered coatings almost revealed higher hardness than the rule-of-mixtures value of monolithic TaN and NbN coatings. At FAr:FN2 =10, the multilayered coating possessed excellent hardness, elastic modulus, internal stress, and fracture resistance, compared with ones synthesized at other Ar/N2 flow rates. The layered structure with strong mixture of TaN (110), (111), (200) and Nb2N (101) textures should be related to the enhanced mechanical properties.

Key words: RF magnetron sputtering, TaN/NbN multilayered coatings, Nanoscale

李德军; 张学华; 曹猛; 杨谨; 刘桐. Influence of Ar/N2 Flow Rate on Structure and Property for TaN/NbN Multilayered Coatings[J]. J. Mater. Sci. Technol., 2007, 23(04): 461-464.

Xuehua ZHANG, Yuanbin KANG, Sipeng LIU, Qiang LI, Ying YANG, Xiangyun DENG, Dejun LI. Influence of Ar/N2 Flow Rate on Structure and Property for TaN/NbN Multilayered Coatings[J]. J Mater Sci Technol, 2007, 23(04): 461-464.

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Influence of Ar/N2 Flow Rate on Structure and Property for TaN/NbN Multilayered Coatings

Influence of Ar/N2 Flow Rate on Structure and Property for TaN/NbN Multilayered Coatings

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