Fig. 11.. (a) Displacement history of point A (as indicated in Fig. 9) when deposing the first three layers. The longitudinal stress distribution of the substrate at selected time: (b) t = 1 s, (c) t = 6 s, (d) t = 8 s, (e) t = 9 s and (f) t = 16 s. (g) enlarged image of the selected area in Fig. 11(e).