An effective strategy towards construction of CVD SiC fiber-reinforced superalloy matrix composite
Haoqiang Zhang, Lin Liu, Zhiliang Pei, Nanlin Shi, Jun Gong, Chao Sun
Table 3 Detailed sputtering parameters used for depositing (Al + Al2O3) diffusion barrier layer and the GH4169 superalloy coating.
Base pressure
(Pa)
Frequency (kHz) Duty cycle
(%)
Voltage (V) Current (A) Time (h)
(Al + Al2O3) Al 4 × 10-3 30 33.3 600 1 0.1
Al2O3 4 × 10-3 30 33.3 400 1.5 18
GH4169 4 × 10-3 30 33.3 600 1.5 18.5