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Robust ultrathin and transparent AZO/Ag-SnO_x/AZO on polyimide substrate for flexible thin film heater with temperature over 400 °C

Zhaozhao Wang^a^,^b, Jia Li^a^,^*(

), Junjun Xu^a^,^b, Jinhua Huang^b, Ye Yang^b, Ruiqin Tan^c, Guofei Chen^b, Xingzhong Fang^b, Yue Zhao^a, Weijie Song^b^,^d^,^**(

)

Fig. 3.. (a) Change in sheet resistance of Ag-SnO_x and AZO/Ag-SnO_x/AZO thin films; (b) Images of AZO/Ag-SnO_x/AZO thin film, upper: as deposited, and lower: after heated at 300 ℃ for 30 min; (c-f) Fluorescence microscope images of AZO/Ag-SnO_x/AZO thin films for 12-36 h HAST, and AZO/Ag/AZO thin film for 24 h HAST; (g) Sheet resistance and (h) transmittance spectra of AZO/Ag-SnO_x/AZO thin film with different hours for HAST.