Abstract: A new nanometer-scale ferrite thin film with excellent high-frequency characteristics has been developed by the spray-spin-heating-coating method. The effects of the ion synthesis mechanism, chemical stoichiometry, fabrication method, and doping content on the magnetic properties and microstructure of the thin films have been analyzed. The films formed between 75℃ and 90℃ by spray-spin-heating-coating methods was discovered with fine grain size of about 21 nm, high saturation magnetization (4 Ms) of about 6.5 kGs, coercivity of about 9.8 Oe, as well as initial permeability of about 14.0. These films can be widely used in radio-frequency integrated circuit devices.

Key words: Nanometer materials, Ferrite thin film, Spray-spin-heating-coating