J Mater Sci Technol ›› 2003, Vol. 19 ›› Issue (01): 27-29.

• Research Articles • Previous Articles     Next Articles

A Study of AlN Films Prepared by Arc Ion Plating

Meidong HUANG, Chunyan LU, Bing WANG, Chao SUN, Rongfang HUANG, Lishi WEN, Guoqiang LIN, Chuang DONG   

  1. Institute of Metal Research, Chinese Academy of Science, Shenyang 110016, China...
  • Received:1900-01-01 Revised:1900-01-01 Online:2003-01-28 Published:2009-10-10
  • Contact: Lishi WEN

Abstract: Hexagonal AlN films have been obtained by arc ion plating at different negative biases.X-ray diffraction and scanning electron microscopy results show that AlN films with smooth surfaces and (002) preferred orientation are obtained at low biases, whereas those with coarse surfaces and (100) preferred orientation are obtained at high biases. The formation mechanism of AlN is analyzed and the experiment results are discussed. The effect of bias on adhesion strength has also been examined.

Key words: AlN, AIP, Preferential orientation, Bias