Fabrication of meander and spiral type micro inductors

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J Mater Sci Technol ›› 2000, Vol. 16 ›› Issue (02): 236-237.

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Fabrication of meander and spiral type micro inductors

T.S.Yoont, W.S.Cio, C.O.Kim, H.W.Kang, Y.H.Kim

Division of Material Eng., Chungnam Nail. Unly., Taejon 305-764, Korea...

Received:1999-07-02 Revised:1999-08-25 Online:2000-03-28 Published:2009-10-10
Contact: T.S.Yoont

Abstract

Abstract: To obtain microstructure of magnetic devices, the thin film inductors were fabricated by the process such as thin film manufacturing, photolithography and wet etching. The frequency characteristics of these devices are measured at high frequency range. When the inductor sizes of the spiral and the meander type are same, the inductance and the quality factor of the spiral type inductor are larger than those of the meander type inductor, but the driving frequency of the spiral type inductor is fewer than that of the meander type inductor.

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T.S.Yoont, W.S.Cio, C.O.Kim, H.W.Kang, Y.H.Kim. Fabrication of meander and spiral type micro inductors[J]. J Mater Sci Technol, 2000, 16(02): 236-237.

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Fabrication of meander and spiral type micro inductors

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