J. Mater. Sci. Technol. ›› 2021, Vol. 65: 7-17.DOI: 10.1016/j.jmst.2020.04.067
• Research Article • Previous Articles Next Articles
Yunsong Niua,*(
), Lingling Xingb, Feng Yangc, Huawei Lib, Minghui Chend, Shenglong Zhua, Fuhui Wangd
Received:2019-11-04
Revised:2020-04-08
Accepted:2020-04-12
Published:2021-02-28
Online:2021-03-15
Contact:
Yunsong Niu
About author:* E-mail address: ysniu@imr.ac.cn (Y. Niu).Yunsong Niu, Lingling Xing, Feng Yang, Huawei Li, Minghui Chen, Shenglong Zhu, Fuhui Wang. Phase structure of sputtered Ta coating and its ablation behavior by laser pulse heating (LPH)[J]. J. Mater. Sci. Technol., 2021, 65: 7-17.
Fig. 1. (a) Cross-sectional morphology of as-deposited Ta coating; (b) XRD patterns of coating surface and interface.
Fig. 2. Phase evolution of Ta sputtering growth. (a) HAADF-STEM image showing the I-IV growth zones in Fig. 2(g); (b) Super-X EDS mapping and inset EDS linings of Fig. 2(a); (c) HRTEM image of I-IV growth zone in Fig. 2(g) and the FFT image is showing the coating zone; (d) Bright-field TEM image of the intermediate layer, which is corresponding to the V growth zone in Fig. 2(g); (e) SAED pattern viewed from Fig. 2(d); (f) Bright-field TEM image and SAED pattern the outer layer of α-Ta, which is corresponding to the VI growth zone in Fig. 2(g); (g) the whole growth mode of sputtered Ta coating, which is divided into six different zones. The growth direction is from top to bottom.
Fig. 3. Phase structure of Ta coating on bcc Ta substrate. (a) HAADF-STEM image at Ta/Ta interface; (e) Super-X EDS mapping and inset EDS linings of Fig. 3(a); (c) HRTEM image.
Fig. 4. XRD patterns of as-deposited coating and coatings after 50 laser pulses. (a) electrodeposited Cr coating; (b) sputtered Ta coating.
Fig. 5. Cross-sectional morphologies of electrodeposited Cr coating after 20 laser pulses (a) optical image; (b) BSE images.
Fig. 6. Cross-sectional morphologies of electrodeposited Cr coating after 50 laser pulses (a) optical image; (b) BSE images.
Fig. 7. Cross-sectional morphologies of electrodeposited Cr coating after 100 laser pulses (a) optical image; (b) BSE images.
Fig. 8. Cross-sectional morphologies of sputtered Ta coating after 20 laser pulses (a) optical image; (b) BSE images.
Fig. 9. Cross-sectional morphologies of sputtered Ta coating after 50 laser pulses (a) optical image; (b) BSE images.
Fig. 10. Cross-sectional morphologies of sputtered Ta coating after 100 laser pulses (a) optical image; (b) BSE images.
Fig. 11. Optical cross-sectional morphologies of sputtered Ta coating after 30 laser pulses at the laser edge.
| Element | ΔHs (kcal) | AD (kcal) | ΔHs/AD |
|---|---|---|---|
| Ta | -92 | 27 | -3.4 |
| Fe | -37 | 23 | -1.6 |
Table 1 Data on solid solutions of O in Ta and Fe.
| Element | ΔHs (kcal) | AD (kcal) | ΔHs/AD |
|---|---|---|---|
| Ta | -92 | 27 | -3.4 |
| Fe | -37 | 23 | -1.6 |
| Melting point (℃) | Boiling point (℃) | Thermal conductivity (W/m K) | |||
|---|---|---|---|---|---|
| 25 ℃ | 527 ℃ | 927 ℃ | |||
| Cr | 1857 | 2672 | 94.8 | 71.3 | 62.4 |
| Ta | 2996 | 5458 | 54.4 | 59.4 | 61 |
Table 2 Physical properties of Cr and Ta.
| Melting point (℃) | Boiling point (℃) | Thermal conductivity (W/m K) | |||
|---|---|---|---|---|---|
| 25 ℃ | 527 ℃ | 927 ℃ | |||
| Cr | 1857 | 2672 | 94.8 | 71.3 | 62.4 |
| Ta | 2996 | 5458 | 54.4 | 59.4 | 61 |
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