Influence of Substrate Negative Bias on Structure and Properties of TiN Coatings Prepared by Hybrid HIPIMS Method

doi:10.1016/j.jmst.2014.06.002

J. Mater. Sci. Technol. ›› 2015, Vol. 31 ›› Issue (1): 37-42.DOI: 10.1016/j.jmst.2014.06.002

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Influence of Substrate Negative Bias on Structure and Properties of TiN Coatings Prepared by Hybrid HIPIMS Method

Zhenyu Wang^{1, 2}, Dong Zhang¹, Peiling Ke^{1, *}, Xincai Liu², Aiying Wang^{1, **}

1 Key Laboratory of Marine Materials and Related Technologies, Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China; 2 Faculty of Materials Science and Chemical Engineering, Ningbo University, Ningbo 315201, China

Received:2013-12-04 Online:2015-01-20 Published:2015-07-23
Contact: * Corresponding author. Ph.D; E-mail address: kepl@nimte.ac.cn (P. Ke).** Corresponding author. Prof., Ph.D.; Tel.: +86 574 86685036;Fax: +86 574 86685159; E-mail address: aywang@nimte.ac.cn (A.Wang).
Supported by:
This work was financially supported by the program of National Natural Science Foundation of China (Grant No. 51375475) and the Instrument Developing Project of the Chinese Academy of Sciences (Grant No. YZ201326).

Abstract

Abstract: TiN coatings were deposited using a hybrid home-made high power impulse magnetron sputtering (HIPIMS) technique at room temperature. The effects of substrate negative bias voltage on the deposition rate, composition, crystal structure, surface morphology, microstructure and mechanical properties were investigated. The results revealed that with the increase in bias voltage from -50 to -400 V, TiN coatings exhibited a trend of densification and the crystal structure gradually evolved from (111) orientation to (200) orientation. The growth rate decreased from about 12.2 nm to 7.8 nm per minute with the coating densification. When the bias voltage was -300 V, the minimum surface roughness value of 10.1 nm was obtained, and the hardness and Young's modulus of TiN coatings reached the maximum value of 17.4 GPa and 263.8 GPa, respectively. Meanwhile, the highest adhesion of 59 N was obtained between coating and substrate.

Key words: TiN, Hybrid HIPIMS, Substrate bias, Microstructure, Mechanical properties

Zhenyu Wang, Dong Zhang, Peiling Ke, Xincai Liu, Aiying Wang. Influence of Substrate Negative Bias on Structure and Properties of TiN Coatings Prepared by Hybrid HIPIMS Method[J]. J. Mater. Sci. Technol., 2015, 31(1): 37-42.

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Influence of Substrate Negative Bias on Structure and Properties of TiN Coatings Prepared by Hybrid HIPIMS Method

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