Tungsten Doped Indium Oxide Thin Films Deposited at Room Temperature by Radio Frequency Magnetron Sputtering

doi:10.1016/j.jmst.2013.10.023

J. Mater. Sci. Technol. ›› 2014, Vol. 30 ›› Issue (7): 644-648.DOI: 10.1016/j.jmst.2013.10.023

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Tungsten Doped Indium Oxide Thin Films Deposited at Room Temperature by Radio Frequency Magnetron Sputtering

Pan Jiaojiao, Wang Wenwen^*, Wu Dongqi, Fu Qiang, Ma Ding

Department of Physics, Beihang University, Beijing 100191, China

Received:2013-05-21 Online:2014-07-20 Published:2014-07-30
Contact: Corresponding author. Assoc. Prof., Ph.D.; Tel.: +86 10 82316883; Fax: +86 10 82315351

Abstract

Abstract: Tungsten doped indium oxide (IWO) thin films were deposited on glass substrate at room temperature by radio frequency reactive magnetron sputtering. Chemical states analysis was carried out, indicating that valence states of element W in the films were W⁴⁺ and W⁶⁺. The effects of sputtering power and film thickness on the surface morphology, optical and electrical properties of IWO thin films were investigated. The IWO thin films had high transmittance in near infrared (NIR) spectral range. The resistivity, carrier mobility and carrier concentration owned their respective optimum values as sputtering power and thickness changed. The as-deposited IWO film with the minimum resistivity of 3.23 × 10^-4 Ω cm was obtained at a sputtering power of 50 W, with carrier mobility of 27.1 cm² V^-1 s^-1, carrier concentration of 7.15 × 10²⁰ cm^-3, average transmittance about 80% in visible region and above 75% in NIR region. It may meet the application requirement of high conductivity and transparency in NIR wavelength region.

Key words: InO: W thin film, Radio frequency magnetron sputtering, Room temperature, Optical and electrical properties

Pan Jiaojiao, Wang Wenwen, Wu Dongqi, Fu Qiang, Ma Ding. Tungsten Doped Indium Oxide Thin Films Deposited at Room Temperature by Radio Frequency Magnetron Sputtering[J]. J. Mater. Sci. Technol., 2014, 30(7): 644-648.

References

[1] J.A.A. Selvan,A.E. Delahoy,S. Guo,Y.M. Li,Sol. Energy Mater. Sol. Cells,90 (2006), pp.3371–3376
[2] W. Miao,X.F. Li,Q. Zhang,L. Huang,Z. Zhang,L. Zhang,X. Yan,Thin Solid Films,500 (2006), pp.70–73
[3] X.W. Xiu,Z.Y. Pang,M. Lv,Y. Dai,L. Ye,S. Han,Appl. Surf. Sci.,253 (2007), pp.3345–3348
[4] P. Jayaram,T.P. Jaya,S.Z. Karazhanov,P.P. Pradyumnan,J. Mater. Sci. Technol.,29 (2013), pp.419–422
[5] R. Levinson,P. Berdahl,H. Akbari,Sol. Energy Mater. Sol. Cells,89 (2005), pp.319–349
[6] J.H. Feng,M. Yang,G.F. Li,Q. Zhang,J. Non-Cryst. Solids,355 (2009), pp.821–825
[7] T. Koida,M. Kondo,J. Appl. Phys.,99 (2007), p.123703
[8] Y. Li,W.W. Wang,J.Y. Zhang,R.M. Wang,Rare Met.,31 (2012), pp.
[9] R.K. Gupta,K. Ghosh,R. Patel,P.K. Kahol,Appl. Surf. Sci.,255 (2008), pp.3046–3048
[10] R.K. Gupta,K. Ghosh,P.K. Kahol,Appl. Surf. Sci.,255 (2009), pp.8926–8930
[11] X.F. Li,Q. Zhang,W.N. Miao,Thin Solid Films,515 (2006), pp.2471–2474
[12] Q. Zhang,X.F. Li,G.F. Li,Thin Solid Films,517 (2008), pp.613–616
[13] X.W. Xiu,Y.P. Cao,Z.Y. Pang,S.H. Han,J. Mater. Sci. Technol.,25 (2009), pp.785–788
[14] L. Hao,X.G. Diao,H.Z. Xu,B.X. Gu,T.M. Wang,Appl. Surf. Sci.,254 (2008), pp.3504–3508
[15] Y.P. Zhang,Y. Li,C.Z. Li,W.W. Wang,J.Y. Zhang,R.M. Wang,Rare Met.,31 (2012), pp.
[16] L.T. Yan,R.E.I. Schropp,Thin Solid Films,520 (2012), pp.2096–2101
[17] Y.W. Huang,G.F. Li,J.H. Feng,Q. Zhang,Thin Solid Films,518 (2010), pp.1892–1896
[18] V. Khranovskyy,U. Grossner,O. Nilsen,V. Lazorenko,G.V. Lashkarev,B.G. Svensson,R. Yakimova,Thin Solid Films,515 (2006), pp.472–476
[19] D.R. Acosta,A.I. Martinez,Thin Solid Films,515 (2007), pp.8432–8437
[20] S.K. Saha,R.S. Howell,M.K. Hatalis,J. Electrochem. Soc.,146 (1999), pp.3134–3138
[21] K.L. Purvis,G. Lu,J. Schwartz,S.L. Bernasek,J. Am. Chem. Soc.,122 (2000), pp.1808–1809
[22] B.Z. Dong,G.J. Fang,J.F. Wang,J. Appl. Phys.,101 (2007), p.33713

Tungsten Doped Indium Oxide Thin Films Deposited at Room Temperature by Radio Frequency Magnetron Sputtering

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