准分子激光微尺度激光冲击强化金属材料的实验分析

J. Mater. Sci. Technol. ›› 2009, Vol. 25 ›› Issue (06): 829-834.

准分子激光微尺度激光冲击强化金属材料的实验分析

车志刚¹;熊良才¹;史铁林¹;杨立昆²;程华炀³

1. 华中科技大学机械科学与工程学院
2. 武汉华工激光工程有限责任公司
3. 机械科学与工程学院

收稿日期:2008-07-04 修回日期:2009-03-18 出版日期:2009-11-28 发布日期:2009-11-24
通讯作者: 车志刚
基金资助:
国家自然科学基金;国家自然科学基金;国家自然科学基金;国家自然科学基金;国家自然科学基金;国家自然科学基金;国家自然科学基金

Experimental Analysis of Microscale Laser Shock Processing on Metallic Material Using Excimer Laser

Zhigang Che¹⁾, Liangcai Xiong¹⁾, Tielin Shi¹⁾, Huayang Cheng¹⁾, Likun Yang²⁾

1) Wuhan National Laboratory for Optoelectronics, State Key Lab of Digital Manufacturing Equipment & Technology,
School of Mechanical Science and Engineering, Huazhong University of Science & Technology, Wuhan 430074, China
2) Wuhan Huagong Laser Engineering Co., Ltd, Wuhan 430223, China

Received:2008-07-04 Revised:2009-03-18 Online:2009-11-28 Published:2009-11-24
Contact: Liangcai Xiong
Supported by:
the National Natural Science Foundation of China (Grant No. 50575078)

摘要/Abstract

摘要：

微尺度激光冲击强化（简称μLSP）是用微米级聚焦激光束照射靶材产生高压等离子体，进而使材料产生塑性变形及压缩残余应力，从而提高MEMS产品抗疲劳抗腐蚀断裂性能的一种新技术。尽管已有大量μLSP实验及研究成果报道，但都是用12微米直径激光束实现。激光束直径为50～200微米的μLSP是第一次用于实验研究。这在处理较大微组件或是微曲面是更适宜的。准分子激光由于其波长更短，更适于μLSP。本文首次给出了具体的微米尺度激光光斑的确定方法。在此基础上，通过实验分析了μLSP的塑性变形、残余应力和微硬度。特别是残余应力随深度的变化在μLSP的实验研究中也是首次。整个实验结果表明，通过该尺度下的μLSP，材料性能得到了显著改善。

关键词: 微尺度激光冲击强化, 塑性变形, 残余应力, 微硬度, 光斑尺寸

Abstract:

Microscale laser shock processing (¹LSP), also known as laser shock processing in microscale, is a technique that uses microscale focused laser beam to induce high pressure plasma and generates plastic deformation and compressive residual stress in target materials, thus improves fatigue or stress corrosion cracking resistance of MEMS (Micro Electromechanical Systems) devices made of such a material. Many works have been reported about the research and experiment for μLSP. But the diameters of 50-200 μm were used at the first time for this field, which was useful for treating micro-device components with larger area and curved surface. The excimer laser was used firstly on μLSP for shorter wavelength than that of used in previous researches. The determination method of laser spot size at micro-level spatial resolution was presented. Under these conditions, plastic deformation, the stress analysis and microhardness with different pulse number, pulse energy and pulse spacing were investigated. Especially the residual stress distribution with depth treated by ¹LSP, was first investigated. Experiment results showed that the material performance was improved remarkably after μLSP.

Key words: μLSP, Plastic deformation, Residual stress, Micro-hardness, Laser spot size

车志刚熊良才史铁林杨立昆程华炀. 准分子激光微尺度激光冲击强化金属材料的实验分析[J]. J. Mater. Sci. Technol., 2009, 25(06): 829-834.

Zhigang Che,Liangcai Xiong,Tielin Shi,Huayang Cheng,Likun Yang. Experimental Analysis of Microscale Laser Shock Processing on Metallic Material Using Excimer Laser[J]. J Mater Sci Technol, 2009, 25(06): 829-834.

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