J. Mater. Sci. Technol. ›› 2005, Vol. 21 ›› Issue (06): 887-890.

• 论文 • 上一篇    下一篇

Effect of Seed Layer on the Orientation of Zinc Oxide Film on Silicon Substrate

肖谧;桑原诚   

  1. 天津大学电子信息工程学院
  • 收稿日期:2004-11-25 修回日期:2005-04-15 出版日期:2005-11-28 发布日期:2009-10-10
  • 通讯作者: 肖谧

Effect of Seed Layer on the Orientation of Zinc Oxide Film on Silicon Substrate

Mi XIAO, Makoto KUWABARA   

  1. School of Electronic Information Engineering, Tianjin University, Tianjin 300072, China
  • Received:2004-11-25 Revised:2005-04-15 Online:2005-11-28 Published:2009-10-10
  • Contact: Mi XIAO

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摘要： 本文讨论了种子层对氧化锌薄膜取向性的影响。在利用溶胶凝胶法制备氧化锌薄膜前，先利用相同的工艺，用浓度较低的前驱体制备一个种子层。实验表明种子层的存在可以有效地改善最终制得的氧化锌薄膜的取向性，同时，加热温度、时间及前驱体浓度都将对最终结果产生影响。

关键词: 氧化锌薄膜, 溶胶-凝胶, 种子层

Abstract: The effect of seed layer on the orientation of ZnO film was investigated. Before the preparation of ZnO film using sol-gel method, seed layer of ZnO was prepared in a similar way using the precursor at a rather low concentration. Experiments show that the existence of seed layer can improve the orientation of the finally prepared ZnO film, while baking temperature, baking time and precursor concentration all have effects on the final results.

Key words: ZnO film, Sol-gel, Seed layer